MSE Supplies offers customized silicon carbide (SiC) engineering ceramic components to meet our customers' application requirements.

The self-bonding fine-grained microstructure of our MSE PRO engineered SiC ceramics have superior properties:

High strength, high density, hardness close to diamond, wear resistant.
Excellent chemical stability, resistant to corrosion of various acids, alkalis, and organic solvents.
High thermal conductivity, low thermal expansion coefficient, thermal shock resistance, and minimum thermal deformation.
High temperature resistance above 1600 degree Celsius, with excellent oxidation resistance.
The resistivity is 106-108Ω, non-magnetic, and meets the requirements of ESD resistance specifications.
High stiffness and excellent thermal uniformity, low probability to bend or deform after long time use.
Plasma resistant, especially suitable for etching process in the semiconductor industry.
Low density and light weight.

Typical Properties and Specifications of MSE PRO Engineered SiC Ceramics:

SiC Content: >99%
Average Grain Size: 4-10 microns
Bulk Density: >3.14 g/cm³
Apparent Porosity: <0.5%
Vickers Hardness (HV0.5): >2800 Kg/mm²
Flexural Strength (modulus of rupture) by 3-point bending at 20C: ~450 MPa
Compressive Strength at 20C: 3900 MPa
Modulus of Elasticity: ~420 GPa
Fracture Toughness: ~3.5 MPa / m^1/2
Thermal Conductivity: 160 W/(m*K)
Electrical Resistivity: 10^6-10^8 Ohm.cm
Coefficient of Thermal Expansion, CTE (from RT to 800C): 4.3 x 10^-6 /K
Max. Use Temperature in Air: 1700 deg. Celsius

For Research Use Only (RUO). Not for use in diagnostic procedures.

Examples of Products

Silicon Carbide Vacuum Chuck and Wafer Handling Arm
Silicon Carbide Vacuum Chuck and Wafer Handling Arm is formed by isostatic pressing process and high temperature sintering. The external dimensions, thickness and shapes can be finished according to the user's design drawings to meet the user's specific requirements.

SiC ceramic nozzles for sulfuric acid atomizer

Silicon Carbide Sulfuric Acid Atomizer Nozzle is formed by isostatic pressing and by pressureless sintering, with excellent performance. Multi-angle drilling, groove processing, inner and outer diameter and end face finish (including curved surfaces) can be processed according to customer requirements, and five-axis processing can be processed to meet the different design needs of users.

SiC ceramic crucibles

The Silicon Carbide Crucible is made of MSE PRO engineered silicon carbide ceramics, formed by isostatic pressing and pressureless sintering. Round, square crucibles, flat bottom, semi-flat bottom and spherical bottom can be made, and can also be processed with flanges, drilling, etc.

SiC ceramic rollers

Silicon Carbide Roller is formed by high-temperature sintering using an extrusion process. Based on user's drawings, drilling, grooving and fine finishing of both ends of the inner and outer diameters can be made to meet the user's engineering installation requirements.

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