ScAlMgO₄Magnesium Aluminate Scandium Oxide (SAM)Substrate

Magnesium Aluminate Scandium Oxide (ScAlMgO₄), also known as SAM, is a promising substrate material for heteroepitaxial growth of GaN or ZnO. It is hexagonal with lattice constant a: 3.246 Å, c: 25.195 Å. With the smallest lattice mismatch with GaN (1.8%) and ZnO (0.09%), it is a much better substrate for the epitaxial of ZnO and GaN compare to sapphire and silicon. It is widely used as substrate for epitaxial growth, power devices, LED, and many other applications.

Dimension: 50.8 +/- 0.5 mm (WA0281) / 5 mm x 10 mm (WA0282) / 10 mm x 10.5 mm (WA0283)
Thickness: 350 +/- 25 um
Primary Flat Location: A-axis (11-20)
Primary Flat Length: 16 +/- 1 mm
Orientation: (0001) C-plane
Total Thickness Variation: ≤ 10 um
Bow: 0 +/- 10 um
Polishing: Front surface: Ra < 0.3 nm epi ready, Back surface: lapped

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Customization:

Customized ScAlMgO₄ products can be made to meet customer's particular requirements and specifications.

References:

ScAlMgO4 Magnesium Aluminate Scandium Oxide (SAM) Substrate

ScAlMgO₄Magnesium Aluminate Scandium Oxide (SAM)Substrate

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