Additional Info
Evaporation materials are essential to thin film deposition in physical vapor deposition (PVD) processes, where controlled heating via thermal evaporation, resistance evaporation, or electron beam evaporation enables material vaporization and transport to a substrate. These materials are widely used for vacuum deposited thin films requiring stable deposition rate and predictable deposition kinetics.
This category includes evaporation materials designed for compatibility with common evaporation sources and deposition systems:
- Pure metal evaporation materials and refractory metals with high melting points, supporting metal deposition in semiconductor manufacturing, data storage, and conductive thin film coatings.
- Oxide and compound materials such as silicon dioxide and silicon nitride used in dielectric thin film applications, optical coating stacks, and solar cells.
- Target material formats including pellets, granules, and slugs compatible with electron beam starter sources, evaporation boats, and Tungsten Filaments.
Selecting evaporation materials requires evaluation of:
- Melting point and vapor pressure, which govern evaporation behavior and stability in vacuum thermal evaporation and e-beam evaporation processes.
- Deposition rate and deposition kinetics, influencing coating attributes, thickness control, and thin film uniformity.
- Source compatibility, including use with evaporation boats, PBN-made crucibles, and copper hearths in electron beam deposition systems.
- Process monitoring, where Quartz Crystal Microbalances or quartz crystal monitor systems ensure repeatable thin-film deposition.
Evaporation materials are widely used in:
- Semiconductor manufacturing for metal films and dielectric thin film layers in logic & memory devices.
- Optical coating of optical components requiring precise thin film coatings.
- Energy and advanced materials applications such as solar cells and micro/nano devices.
Evaporation materials are often evaluated alongside sputtering deposition and chemical vapor deposition depending on coating mechanisms and application requirements.
Through its portfolio of evaporation materials, MSE Supplies supports thin film deposition workflows with high-purity target material options and system-compatible formats. For technical guidance or custom-designed evaporation sources, the MSE Supplies team can assist in aligning materials with specific deposition processes.
