Compact Magnetron Ion Sputtering Coater for SEM Sample Preparation

MSE Supplies offers a compact magnetron sputtering coater that is ideal for lab SEM sample preparation. It is widely used to coat non-conductive SEM samples with Au for better imaging. It is also excellent for surface treatment and coating when using other sputtering targets. Low vacuum, less than 3Pa can be achieved quickly when using proper vacuum pumps. It generates much less heat and avoids plasma damage to the substrate sample. It is user friendly and easy to operate using touch panel control.

This mini coater is mainly used for sputtering Au, Pt, and Pd under air.

Vacuum pump is not included. You can order Vacuum pump with additional cost.

Brand: MSE PRO™

Manufacturer: MSE Supplies LLC

MSE Supplies is a leading Sputtering Targets supplier and offers custom-made high purity sputtering targets.

Technical Specifications

SKU#	MA0600
Chamber Size	~Ø 120 *120 mm
Chamber Material	Quartz Glass
Compatible Target Size	Ø 50 0.1-1mm Ø 50 1-2mm (Need to be used together with customized accessories)
Sputtering Source Power	DC magnetron, Max. 20 W, Max. 60 mA, 0-800 V
Target-to-Substrate Distance	50 mm
Sample stage size	2 inch diameter
Vacuum Limit	<2 Pa
Operation Vacuum	5-10 Pa
Color	Light blue/Navy Blue
Sputtering Time	Programable
Operation Method	Control Touch Panel
Weight	about 18 kg
Dimension	250360306 mm
Supply Voltage	110V (220v, other voltages are possible on request)
Total Electric Power	<500 W
Cooling Method	Air cooled
Warranty	One year limited warranty with lifetime product support
Document

# Use air as sputtering gas. All in one device- No need to connect Ar gas (no Ar gas inlet connection )

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