Features of Undoped Silicon Sputtering Target

Material Type	Silicon
Symbol	Si
Atomic Weight	28.0855
Atomic Number	14
Color/Appearance	Dark Gray with a Bluish Tinge, Semi-Metallic
Thermal Conductivity	150 W/m.K
Melting Point (°C)	1,410
Bulk Resistivity	>1 OHM-CM
Coefficient of Thermal Expansion	2.6 x 10^-6/K

Theoretical Density (g/cm3)	2.32
Dopant	Undoped
Z Ratio	0.712
Sputter	RF
Max Power Density (Watts/Square Inch)	20
Type of Bond	Indium, Elastomer
Comments	Alloys with W; use heavy W boat. SiO₂produced.

Name: Silicon
Symbol: Si
Atomic Number: 14
Atomic Mass: 28.0855 amu
Melting Point: 1410.0 °C (1683.15 K, 2570.0 °F)
Boiling Point: 2355.0 °C (2628.15 K, 4271.0 °F)

Number of Protons/Electrons:14
Number of Neutrons:14
Classification: Metalloid
Crystal Structure: Cubic
Density @ 293 K: 2.329 g/cm³
Color: grey

Product List for Silicon Sputtering Target and Related Products

Pure Silicon

Name		Purity	Form
Silicon	Si	99.999%	Sputtering Targets, Boat, Crystal, Wafer, Disk, Plate, Sheet, Tube, Evaporation Material, Powder

Silicon Alloys

Name		Purity	Form
Aluminum Silicon Alloy	AlSi Alloy	AlSi 99/1, 90/ 10	Ingots, Sputtering Target, Granule, Discs, Plates, Sheets, Circle
Aluminum Magnesium Silicon Alloy	AlMgSi Alloy	AL-Mg-Si	Ingots
Aluminum Niobium Silicon Alloy	AlNbSi Alloy	AlNbSi 46/52/2	Granules, Powders
Chromium Silicon Alloy	CrSi Alloy	96%-99%	Powder(40-300mesh)
Copper Silicon Alloy	CuSi Alloy	CuSi 90/10, 85/15	Broken ingots
Copper Silicon Alloy	CuSi Alloy	CuSi 80/20, 70/30	Broken ingots
Iron Silicon Zirconium Alloy	FeSiZr Alloy	FeSiZr	Lumps
Iron Silicon Manganese Aluminum Alloy	FeSiMnAl Alloy	FeSiMnAl 40/20/20/20	Lumps
Nickel Magnesium Silicon Iron Alloy	NiMgSiFe Alloy	NiMgSiFe 47/16/20	Lumps
Nickel Magnesium Silicon Iron Alloy	NiMgSiFe Alloy	NiMgSiFe 60/16/6	Lumps
Nickel Magnesium Silicon Iron Alloy	NiMgSiFe Alloy	Ni-Mg-SiFe 60/16/6	Lumps
Nickel Magnesium Iron Silicon Cerium Alloy	NiMgFeSiCe Alloy	NiMgFeSi 65/15/15/5	Lumps
Nickel Magnesium Iron Silicon Cerium Alloy	NiMgFeSiCe Alloy	NiMgFeSi 50/15/15/20	Lumps
Silicon Titanium Alloy	SiTi Alloy	Si-Ti 53/47	Powders
Silicon Manganese Alloy	SiMn Alloy	Custom-made	powders
Zirconium Silicon Alloy	ZrSi Alloy	Custom -made	Powders

Silicon Compounds

Name	Sign	Purity	Character
Chromium Silicide	Cr₃Si	99.99%, 99.5%	Sputtering Target, Evaporation Material, Substrate, Granule, Discs, Plates, Sheets, Circle, Powders(40-300mesh)
Chromium Silicide	CrSi₂	99.99%, 99.5%	Sputtering Target, Evaporation Material, Substrate, Granule, Discs, Plates, Sheets, Circle, Powders(40-300mesh)
Hafnium Silicide	HfSi₂	99.99%, 99.5%	Sputtering Target, Evaporation Material, Substrate, Granule, Discs, Plates, Sheets, Circle, Powders(40-300mesh)
Magnesium Silicide	Mg₂Si	99.99%,99.999%	Powder, lump, chunk
Molybdenum Silicon	MoSi₂	99.99%, 99.5%	Sputtering Target, Evaporation Material, Substrate, Granule, Discs, Plates, Sheets, Circle, Powders(40-300mesh)
Niobium Silicide	NbSi₂	99.99%, 99.5%	Sputtering Target, Evaporation Material, Substrate, Granule, Discs, Plates, Sheets, Circle, Powders(40-300mesh)
Silicon Carbide	SiC	99.99%, 99.5%	Sputtering Target, Granule, Discs, Plates, Sheets, Circle, Pellet, Nanometer Powder, Powders(40-300mesh)
Silicon Dioxide	SiO₂	99.99%, 99.5%	Sputtering Target, Evaporation Material, Substrate, Wafer, Granule, Discs, Plates, Sheets, Circle, Pellet
Silicon Monoxide	SiO	99.99%, 99.5%	Sputtering Target, Evaporation Material, Granule, Discs, Plates, Sheets, Circle, Pellet
Silicon Nitride	Si₃N₄	99.99%, 99.5%	Sputtering Target, Evaporation Material, Granule, Discs, Plates, Sheets, Pellet, Nanometer Powder, Powders(40-300mesh)
Tantalum Silicide	TaSi₂	99.99%, 99.5%	Sputtering Target, Evaporation Material, Substrate, Granule, Discs, Plates, Sheets, Circle, Powders(40-300mesh)
Tantalum Silicide	Ta₅Si₃	99.99%, 99.5%	Sputtering Target, Evaporation Material, Substrate, Granule, Discs, Plates, Sheets, Circle, Powders(40-300mesh)
Titanium Silicide	TiSi₂	99.99%, 99.5%	Sputtering Target, Evaporation Material, Substrate, Granule, Discs, Plates, Sheets, Circle, Powders(40-300mesh)
Titanium Silicide	Ti₅Si₃	99.99%, 99.5%	Sputtering Target, Evaporation Material, Substrate, Granule, Discs, Plates, Sheets, Circle, Powders(40-300mesh)
Tungsten Silicide	WSi₂	99.99%, 99.5%	Sputtering Target, Evaporation Material, Substrate, Granule, Discs, Plates, Sheets, Circle, Powders(40-300mesh)
Vanadium Silicide	V₃Si	99.5%	Sputtering Target, Evaporation Material, Substrate, Granule, Discs, Plates, Sheets, Circle, Powders(40-300mesh)
Vanadium Silicide	VSi₂	99.5%	Sputtering Target, Evaporation Material, Substrate, Granule, Discs, Plates, Sheets, Circle, Powders(40-300mesh)
Zirconium Silicon	ZrSi₂	99.9%	Sputtering Target, Evaporation Material, Substrate, Granule, Discs, Plates, Sheets, Circle, Powders