Aluminum Sputtering Target Description

Aluminum is one of the most common metals in the world. It can be found in kitchen utensils, cars, street lights, and the popular aluminum foil food packaging. Aluminum is a silvery-white, metallic material. It is light, malleable, ductile, and non-magnetic under normal conditions. It has a density of 2.7 g/cc, a melting point of 660°C, and a vapor pressure of 10^-4 Torr at 1,010°C.

Although it is not a strong material, it is a good conductor of heat and electricity and is able to form an oxide layer that is resistant to corrosion. Due to its high reactivity, it is rarely found in nature as a free element. When evaporated in a vacuum, aluminum layers form a reflective coating found on telescopes, automotive headlamps, mirrors, packages, and toys. It is widely used in the aerospace, automotive lighting, OLED, and optical industries.

Aluminum Sputtering Target Specifications

Material Type	Aluminum
Symbol	Al
Purity	99.99%, 99.999%
Atomic Weight	26.9815386
Atomic Number	13
Color/Appearance	Silvery, Metallic
Thermal Conductivity	235 W/m.K
Melting Point (°C)	660
Coefficient of Thermal Expansion	23.1 x 10^-6/K

Theoretical Density (g/cm³)	2.7
Z Ratio	1.08
Sputter	DC
Max Power Density (Watts/Square Inch)	150
Type of Bond	Indium
Comments	Alloys W/Mo/Ta. Flash evaporation or use BN crucible.