MSE PRO Tungsten Sputtering Target W
Specifications for Tungsten Sputtering Target
| Material Type | Tungsten |
| Symbol | W |
| Atomic Weight | 183.84 |
| Atomic Number | 74 |
| Color/Appearance | Grayish White, Lustrous, Metallic |
| Thermal Conductivity | 174 W/m.K |
| Melting Point (°C) | 3,410 |
| Coefficient of Thermal Expansion | 5.5 x 10-6/K |
| Theoretical Density (g/cc) | 19.25 |
| Z Ratio | 0.163 |
| Sputter | DC |
| Max Power Density (Watts/Square Inch) |
100 |
| Type of Bond | Indium |
| Comments | Forms volatile oxides. Films hard and adherent. |
| Purity | 99.95% |
Typical analysis:
|
Chemical Analysis via ICP-AES |
|
|
Element |
Value (ppm) |
|
Mg |
8 |
|
Al |
8 |
|
Si |
16 |
|
Ca |
25 |
|
Ti |
21 |
|
V |
10 |
|
Co |
8 |
|
Cu |
15 |
|
Zn |
8 |
|
S |
10 |
|
Sb |
10 |
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