MSE PRO Silicon Nitride Sputtering Target Si3N4

SKU: TA3515

  • $ 23595
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Silicon Nitride (Si3N4) Sputtering Target Specifications

To add a Cu Backing Plate with Indium Bonding for Sputtering Targets  

Material Silicon Nitride
Purity (%) 99.5
CAS Number 12033-89-5
Chemical Formula
Molar Mass (g/mol) 140.283
Color/Appearance White to Gray or Dark Gray to Black, Crystalline Solid
Melting Point (°C) 1,900
Theoretical Density (g/cm3) 3.17
Z Ratio 1.00
Sputter RF, RF-R
Max Power Density
(Watts/Square Inch)