MSE PRO Gas Mass Flow Controller/ Flowmeter, 0-1 SLM Flow Ranges
SKU: MA3387
MSE PRO™ Gas Mass Flow Controller/ Flowmeter, 0-1 SLM Flow Ranges
Overview
The MSE PRO™ Gas Mass Flow Controller/Flowmeter adopts independently developed industrial-grade advanced mass flow sensor chip. By integrating a low-pressure-loss gas circuit design with high-speed digital processing circuits and temperature compensation algorithms, it enables precise and rapid gas flow control within the range of 0 to 1 SLM.
Optional touchscreen display modules and independent power supply ports are available. This product is ideally suited for use in semiconductor processing, vacuum coating, laboratories, photonics, analytical instruments, and various other application environments.
Features:
- Dual Display. Equipped with a front touch color display screen and a high-brightness digital display and address dial on the top.
- Adjustable Flow Range. Users can adjust the output flow range as needed (adjustable from 20% to 100% of the full range), allowing better adaptation to application scenarios and reducing preparation time.
- Fast Response. 1.5 ms chip response time, 0.1–0.5 s system response time, enabling real-time detection of small flow changes.
- High Accuracy. Maintains high accuracy across the full scale (1.0%–100% F.S.)
- Dedicated Software. Equipped with the powerful SmartFlow software, supporting multi-device connections for convenient monitoring and configuration.
- Certified Product. Certified by TÜV, CE & EMC, and Metrology Institutes, meeting multiple SEMI standards.
Internal Circuit and Gas Path Diagram
Technical Specifications:
| Model | MA3387 |
| Gas Quality Requirement | Clean, dry, non-corrosive gases |
| Gas Types | Air, nitrogen, carbon dioxide, hydrogen, helium, argon, etc. |
| Flow Ranges (Equivalent to N₂) ① | 0–1 LPM; Other ranges upon request |
| Accuracy | ±0.3% F.S. (≤30% F.S.); ② ±1.0% S.P. (>30% F.S.) ③ |
| Turndown Ratio | 100:1 |
| Response Time ④ | ≤ 0.5 s |
| Repeatability | ≤ ±0.2% F.S. |
| Resolution | 0.01 sccm |
| Leak Rate | < 1 × 10⁻¹⁰ Pa·m³/s (He) |
| Max Pressure Tolerance | 9.8 bar |
| Operating Temperature | 0–50 °C |
| Operating Humidity | 10%–90% R.H. (non-condensing, non-frosting) |
| Operating Pressure ⑤ | 0.5–6 bar |
| Storage Temperature | -20–85 °C |
| Power Supply Voltage | DC 24V |
| Power Consumption | < 4.0 W |
| Startup Time | < 1 s |
| Interface Type | D-SUB9, RJ45 |
| Analog Control | 0–5V or 4–20mA |
| Digital Control | RS485 or RS232 |
| Communication Port | D-SUB9 or RJ45 |
| Baud Rate | 9600, 38400, 115200 (default) |
| Protocol | Modbus-RTU |
| Device Address | 1 (default) – 99 |
| Connection Type | Compression: 1/4 inch; VCR: 1/4 inch; Others optional |
| Gas Contact Materials | 316L stainless steel, FKM (Viton), silicon dioxide |
| Body Material | Base: 316L stainless steel; Shell: Aluminum alloy |
| Seal Material | FKM (Viton) |
| Weight | 0.95 kg |
Notes
-
Unless otherwise specified, the product specifications are based on the following conditions:
Hydrogen, 25 °C, 2.5 bar differential pressure (inlet 3.5 barA, outlet 1 barA), and horizontal orientation. -
It is recommended to install a straight pipe section of appropriate size at the inlet to avoid potential accuracy deviations.
-
It is recommended to match the inlet and outlet ports with connectors of the same size as much as possible to prevent abnormal pressure loss.
① Flow ranges refer to nitrogen equivalent.
② %F.S. refers to the percentage of full scale.
③ %S.P. refers to the percentage of set point value.
④ Response time refers to the time needed to reach ±2% of the set value.
⑤ Operating pressure refers to the pressure difference between the inlet and outlet.