4N (99.99%) Yttrium Oxide (Y<sub>2</sub>O<sub>3</sub>) Pieces (2-5mm) Evaporation Materials - MSE Supplies LLC

MSE PRO 4N (99.99%) Yttrium Oxide (Y2O3) Pieces (2-5mm) Evaporation Materials

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MSE PRO™ 4N (99.99%) Yttrium Oxide (Y2O3) Pieces (2-5mm) Evaporation Materials

Yttrium Oxide (Y2O3) is a white crystalline solid that is widely used for phosphors, solid-state laser, and gas lighting. Yttrium oxide thin films have high electric resistivity, good dielectric permittivity, low dielectric losses and good transparency in a wide spectral range with little light diffusion. Due to these properties, yttrium oxide is a prospective material for antireflecting and protective coatings, interference mirrors, and for manufacturing passive components and dielectric layers in multilevel integrated circuits.

The dimensions and purities can be customized upon request. Please contact us for customization or bulk orders

Name Yttrium Oxide
Chemical Formula Y2O3
CAS # 1314-36-9
Molecule Weight (g/mol) 225.81
Color/Appearance White, Crystalline Solid
Purity ≥99.99%, 4N
Melting Point (°C) 2,410
Theoretical Density (g/cm3) 5.01
E-Beam Good
Thermal Evaporation Techniques Boat:  W
Crucible:  C
E-Beam Crucible Liner Material Graphite, Tungsten
Temp. (°C) for Given Vap. Press. (Torr) 10-4:  ~2,000

MSE Supplies offers a variety of crucibles for evaporation materials. We can customize the dimensions based on your requirements.


1. Electrical behaviour of electron-beam-evaporated yttrium oxide thin films on silicon. Thin Solid Films 199, no. 1 (1991): 1-8.

2. Some dielectric properties of electron-beam evaporated yttrium oxide thin films. Thin Solid Films 6, no. 3 (1970): 197-202.

3. Growth conditions, optical and dielectric properties of yttrium oxide thin films. physica status solidi (a) 145, no. 2 (1994): 441-446.