3N5 (99.95%) Tantalum Pentoxide (Ta<sub>2</sub>O<sub>5</sub>) Tablets Evaporation Materials - MSE Supplies LLC

MSE PRO 3N5 (99.95%) Tantalum Pentoxide (Ta2O5) Tablets (1-6mm) Evaporation Materials

  • $ 14995
  • Save $ 1800

MSE PRO™ 3N5 (99.95%) Tantalum Pentoxide (Ta2O5) Tablets (1-6mm) Evaporation Materials

Tantalum pentoxide (Ta2O5) is a white solid that is insoluble in all solvents but is attacked by strong bases and hydrofluoric acid. It is used for optical coating due to its high refractive index and low absorption. Tantalum pentoxide thin film is also extensively used in the production of capacitors, due to its high dielectric constant.

The dimensions and purities can be customized upon request. Please contact us for customization or bulk orders

Name Tantalum Pentoxide
Chemical Formula Ta2O5
CAS# 1314-61-0
  • TA3878: 50g
  • TA3879: 100g
Molecule Weight (g/mol) 441.89
Color/Appearance White, Crystalline Solid
Purity ≥99.95%, 3N5
Melting Point (°C) 1,872
Theoretical Density (g/cm3) 8.2
Z Ratio 0.3
E-Beam Good
Thermal Evaporation Techniques Boat:  Ta
Coil:  W
Basket:  W
E-Beam Crucible Liner Material Graphite, Tantalum
Temp. (°C) for Given Vap. Press. (Torr) 10-8:  1,550
10-6:  1,780
10-4:  1,920

MSE Supplies offers a variety of crucibles for evaporation materials. We can customize the dimensions based on your requirements.


1. Comparative analysis of electrophysical properties of ceramic tantalum pentoxide coatings, deposited by electron beam evaporation and magnetron sputtering methods. In Journal of Physics: Conference Series, vol. 558, no. 1, p. 012036. IOP Publishing, 2014.

2. Effect of growth temperature on the properties of evaporated tantalum pentoxide thin films on silicon deposited using oxygen radicals. Journal of applied physics 84, no. 3 (1998): 1632-1642.