MSE PRO 3D Optical Surface Profilometer with 320x200mm Table Size, 1.85 µm/s Scanning Speed

MSE PRO 3D Optical Surface Profilometer with 320x200mm Table Size, 1.85 µm/s Scanning Speed

SKU: MA2220

  • $ 69,53995
  • Save $ 7,73000

MSE PRO™ 3D Optical Surface Profilometer with 320x200mm Table Size, 1.85 µm/s Scanning Speed

MSE PRO™ 3D Optical Surface Profilometer is a precision inspection instrument designed for measuring sub-nanometer surface details of a variety of devices and materials. It utilizes white light interferometry technology and a precise Z-direction scanning module to capture a non-contact scan of the surface and create a 3D image. The accompanying software then processes and analyzes this image to generate 2D and 3D parameters that reflect the quality of the surface, making it perfect for use in industries such as semiconductor manufacturing, 3C electronics, optical processing, nanomaterials, automotive parts, and more.

This profilometer offers unparalleled accuracy and consistency, with advanced capabilities such as environmental noise detection and precision control. Equipped with double anti-collision protection measures and a dual-channel air flotation vibration isolation system for superior performance.


  • Measure roughness, step height, angles, and other contour dimensions of micro-morphology.
  • Functions include automatic auto-focus, stripe finding, and brightness adjustment during measurement.
  • Automatic splicing and multi-region measurement during measurement.
  • Perform data processing on four modules: leveling, image retouching, denoising and filtering, and region extraction during analysis.
  • Provides 5 analysis functions: roughness, geometric contour, structure, frequency, and function.
  • Offers one-click and multi-file analysis functions.

Brand: MSE PRO™ 

Manufacturer: MSE Supplies LLC

MSE Supplies offers various optical metrology instruments. Please contact us for more information.


SKU# MA2220
Light Source White LED
Video System 1024 x 1024
Objective Lens


Optional:2.5X, 5X, 20X, 50X, 100X

Optical Zoom Standard: 0.5X
Optional: 0.375X, 0.75X, 1X
Standard Field of View 0.98 x 0.98 mm
Lens Turret Standard: Manual 3 holes turret
Optional: Motorized 5 holes turret
XY Object Table Size 320 x 200 mm
Travel range 140 x 100 mm
Load capacity 10 kg
Control method Motorized
Tilt ±5°
Z Axis Travel Range 100 mm
Control method Motorized
Z Stroke Scanning Range 10 mm
Surface Form Repeatability 0.1 nm
Roughness RMs Repeatability 0.005 nm
Step Height Measurement

Accuracy: 0.3%


Scanning Speed@0.1 nm resolution 1.85 µm/s
Reflectivity of Test object 0.05%~100%
Weight <160 kg
Size (L*W*H) 700 x 606 x 920 mm
Operating Environment Temperature 15°C-30°C, fluctuation <1°C/15 min
Humidity 5%-95% RH, no condensation
Vibration VC-C or better
Software Noise Evaluation 3σ ≤ 4 nm
Compressed Air 0.6 Mpa oil-free, water-free, 6 mm diameter of hose
Power Supply AC100~240V, 50/60Hz, 4A, 300W
Other No strong magnetic field, No corrosive gas