MSE PRO Erbium Oxide Sputtering Target Er2O3
SKU: TA5002
Specifications for Erbium Oxide Sputtering Target
To add a Cu Backing Plate with Indium Bonding for Sputtering Targets
| Material Type | Erbium Oxide |
| Symbol | Er2O3 |
| Color/Appearance | Pink, Solid |
| Melting Point (°C) | 2,350 |
| Theoretical Density (g/cc) | 8.64 |
| Z Ratio | **1.00 |
| Sputter | RF, RF-R |
| Type of Bond | Indium, Elastomer |
| Purity | 99.99% |