Both standard and custom-made high purity (>99.99%, trace metal basis) carbon (graphite) sputtering targets are available.
To add a Cu Backing Plate with Indium Bonding for Sputtering Targets 
Typical specifications of graphite blocks
Carbon (Graphite) (C) Properties
| Material Type |
Carbon |
| Symbol |
C |
| Atomic Weight |
12.0107 |
| Purity (%) |
>99.99 (trace metal basis) |
| Color/Appearance |
Black, Non-Metallic |
| Thermal Conductivity |
140 W/m.K |
| Melting Point (°C) |
~3,652 |
| Coefficient of Thermal Expansion |
7.1 x 10-6/K |
| Theoretical Density (g/cm3) |
2.25 |
| Z Ratio |
3.26 |
| Sputter |
PDC |
Max Power Density
(Watts/Square Inch) |
80 |
| Type of Bond |
Indium Bonding |
| Comments |
E-beam preferred. Arc evaporation. Poor film adhesion. |
| Available Products |
| Pure Carbon |
| Name |
|
Purity |
|
Carbon (Graphite)
Sizes and Shapes can be custom made
|
C
|
>99.99% (trace metal basis)
|
|
| Carbon Alloys |
| Name |
|
Composition |
|
Aluminum Titanium Carbon Alloy
|
AlTiC Alloy
|
5% Ti - 0.2% C
|
|
Aluminum Titanium Carbon Alloy
|
AlTiC Alloy
|
3% Ti - 0.2% C
|
|
Aluminum Titanium Carbon Alloy
|
AlTiC Alloy
|
3% Ti - 0.15% C
|
|
| Carbon Compounds |
|
Name
|
Formula
|
|
Boron Carbide
|
B4C
|
|
Chromium Carbide
|
Cr3C2
|
|
Chromium Carbonitride
|
CrCN
|
|
Hafnium Carbide
|
HfC
|
|
Molybdenum Carbide
|
Mo2C
|
|
Niobium Carbide
|
NbC
|
|
Silicon Carbide
|
SiC
|
|
Tantalum Carbide
|
TaC
|
|
Titanium Carbide
|
TiC
|
|
Titanium Carbonitride
|
TiCN
|
|
Tungsten Carbide
|
WC
|
|
Tungsten Carbide
|
W2C
|
|
Tungsten Carbide - Cobalt
|
WC - 6 wt. % Co
|
|
Tungsten Carbide - Cobalt
|
W2C - 12 wt. % Co
|
|
Vanadium Carbide
|
VC
|
|
Zirconium Carbide
|
ZrC
|
|
