6 inch Sapphire Wafer C-Plane Single or Double Side Polish Al2O3 Singl

6 inch Sapphire Wafer C-Plane Single or Double Side Polish Al2O3 Single Crystal

Material: High purity single crystal Al₂O₃, sapphire wafer.
Dimension: Φ150 mm ± 0.05 mm, 6 inch
Thickness: 1300 ± 25 µm
Orientation: C plane (0001) off M (1-100) plane 0.2 ± 0.05 degree
Primary flat orientation: A plane ± 1 degree
Primary flat length: 51 mm ± 1 mm
Total Thickness Variation (TTV): <20 μm
Bow: <25 μm
Warp: <25 μm
Polishing: single side polished (SSP) or double side polished (DSP) Ra < 0.5 nm (by AFM). The reverse side of SSP wafer was fine ground to Ra = 0.8 - 1.2 um.
Transmittance: 88% +/-1 % @460 nm
Package: packaged in a class 100 clean room environment, in cassettes of 25 pieces or single wafer containers, under nitrogen atmosphere.

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