6 inch High Purity (Undoped) Silicon Carbide Wafers Semi-Insulating SiC Substrates (HPSI)
SKU: WA5501
6 inch High Purity (Undoped) Silicon Carbide Wafers Semi-Insulating SiC Substrates (HPSI)
Specifications:
| Grade | Production Grade | Dummy Grade |
| Polytype | 4H | |
| Diameter | 150.0 mm +/- 0.2 mm | |
| Thickness | 500 um +/- 25 um | |
| Wafer Orientation | On axis: <0001> +/- 0.25 deg | On axis: <0001> +/- 0.25 deg |
| Micropipe Density for 95% of Wafers (MPD) | ≤ 1 cm-2 | ≤ 10 cm-2 |
| Electrical Resistivity | ≥ 1E8 ohm cm | 70% area ≥ 1E5 ohm cm |
| Dopant | Undoped | |
| Notch Orientation | {1-100} +/- 5.0 deg | |
| Notch Depth | 1~1.25mm | |
| LTV/TTV/Bow/Warp | 3 um /5 um / ±25 um /35 um (Production Grade) | |
| 10 um /15 um / ±45 um /55 um (Dummy Grade) | ||
| Surface Roughness | C-face: Polished |
|
| Si-face: CMP | ||
| Hex Plates (inspected by high intensity light*) | None | do not test |
| Scratches (inspected by high intensity light) | ≤ 5 scratches and cumulative length ≤ 150 mm | do not test |
PROPERTIES OF SILICON CARBIDE CRYSTAL MATERIALS
|
Property |
4H-SiC Single Crystal |
|
Lattice Parameters (Å) |
a=3.076 c=10.053 |
|
Stacking Sequence |
ABCB |
|
Density |
3.21 |
|
Mohs Hardness |
~9.2 |
|
Thermal Expansion Coefficient (CTE) (/K) |
4-5 x 10-6 |
|
Refraction Index @750 nm |
no = 2.61 ne = 2.66 |
|
Dielectric Constant |
c ~ 9.66 |
|
Doping Type |
Undoped Semi-insulating |
|
Thermal Conductivity (W/cm-K @298 K) (Semi-insulating type) |
a~4.9 c~3.9
|
|
Band-gap (eV) |
3.23 |
|
Break-Down Electrical Field (V/cm) |
3-5 x 106 |
|
Saturation Drift Velocity (m/s) |
2.0 x 105 |
|
Wafer and Substrate Sizes |
Wafers: 4, 6 inch; other sizes are available and can be custom-made upon request |
|
Product Grades |
A Grade Production grade (MPD 1 cm-2) C Grade Dummy grade (MPD 10 cm-2) |
Price
MSE Supplies offers the best price on the market for high quality SiC wafers and SiC crystal substrates up to six (6) inch diameter. Our price matching policy guarantees you the best price for the SiC crystal products with comparable specifications. CONTACT US today to get your quote.
Customization
Customized SiC crystal products can be made to meet customer's particular requirements and specifications. Epi-wafers can be custom made upon request.