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10 mm x 10 mm 6H Semi-Insulating Type SiC, Research Grade, Silicon Carbide Crystal Substrate

  • $ 13900


10 mm x 10 mm 6H Semi-Insulating Type SiC (0001), Research Grade, Silicon Carbide Crystal Substrate, Double Side Polished, Si face CMP polished (epi ready) 

Size

10 mm x 10 mm

Thickness

350 μm ± 25 μm (SI type)

Crystal Orientation

On axis: <0001> ± 0.5° for 6H-SI

Micropipe Density (MPD) ≤15 cm-2

Electrical Resistivity

6H-SI

>1E5 Ω·cm

Surface Roughness

Polish   Ra ≤1 nm (C face)

CMP    Ra ≤0.5 nm (Si face)

 

PROPERTIES OF SILICON CARBIDE CRYSTAL MATERIALS

Property

4H-SiC Single Crystal

6H-SiC Single Crystal

Lattice Parameters (Å)

a=3.076

c=10.053

a=3.073

c=15.117

Stacking Sequence

ABCB

ABCACB

Density

3.21

3.21

Mohs Hardness

~9.2

~9.2

Thermal Expansion Coefficient (CTE) (/K)

4-5 ×10-6

4-5 ×10-6

Refraction Index @750nm

no = 2.61

ne = 2.66

no = 2.60

ne = 2.65

Dielectric Constant

c ~ 9.66

c ~ 9.66

Doping Type

N-type or Semi-insulating

N-type or Semi-insulating

Thermal Conductivity (W/cm·K @298K)

(N-type, 0.02 ohm·cm)

a~4.2

c~3.7

  

Thermal Conductivity (W/cm·K @298K)

(Semi-insulating type)

a~4.9

c~3.9

 

a~4.6

c~3.2

 

Band-gap (eV)

3.23

3.02

Break-Down Electrical Field (V/cm)

3-5×106

3-5×106

Saturation Drift Velocity (m/s)

2.0 x 105

2.0 x 105

Wafer and Substrate Sizes

Wafers: 2”, 3”, 4”, 6”; small substrates: 10x10, 20x20 mm, other sizes are available and can be custom-made upon request

Product Grades

A Grade – Zero micropipe density (MPD ≤ 1 cm-2)

B Grade – Production grade (MPD ≤ 5 cm-2)

C Grade – Research grade (MPD ≤ 15 cm-2)

D Grade – Dummy grade (MPD ≤ 30 cm-2)

 

Price

MSE Supplies offers the best price on the market for high quality SiC wafers and SiC crystal substrates up to six (6) inch diameter.  Our price matching policy guarantees you the best price for the SiC crystal products with comparable specifications.  CONTACT US today to get your quote. 

Customization

Customized SiC crystal products can be made to meet customer's particular requirements and specifications. 

 


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