Ceramic Target Materials for Sputtering, Laser Ablation or PLD
- MSE Supplies can customize ceramic targets with specific chemical compositions and geometric sizes
- Sizes and shapes: A comprehensive range of sizes are available to accommodate the requirements of most popular deposition tools.
- Typical sizes: 1" or 2" diameter, or larger
- Typical Purity: 99%, 99.95%, or higher purity
- Applications: physical vapor deposition (PVD) of thin films, laser ablation deposition (PLD), magnetron sputtering for semiconductor, display, LED and photovoltaic devices.
- Each target can be designed to fit customer specified backing plates or cups with either indium/tin or silver epoxy bonding.
- For product quotation, please email: info@msesupplies.com
- For technical questions: tech@msesupplies.com
Quality Control of MSE Supplies Ceramic Sputtering Targets
Our ceramic processing and fabrication facilities are equipped with advanced analytical and test equipment. Our quality engineers monitor and verify product quality before shipping products to our customers.
- Glow Discharge Mass Spectroscopy (GDMS)
- Atomic Emission Spectroscopy (AES)
- Atomic Absorption Spectroscopy (AAS)
- Scanning Electron Microscopy (SEM)
- X-ray Diffraction (XRD)
- C-SCAN Nondestructive Testing
- Wet Chemistry
Shop Oxide Ceramic Sputtering Targets
| Aluminum Oxide (Al2O3) | Lead Zirconate Titanate (Pb[Zr(x)Ti(1-x)]O3) (PZT) |
| Antimony : Tin Dioxide (Sb:SnO2) (ATO) | Lead Zirconate (PbZrO3) |
| Antimony Oxide (Sb2O3) | Li3PO4 |
| Barium Bismuth Oxide (BaBiO3) | Li4Ti5O12 |
| Barium Calcium Titanate (BaCaxTi(1-x)O3) | LiFePO4 |
| Barium Cobalt Oxide (BaCuO2) | LiMn2O3 |
| Barium Copper Oxide (BaCoO3) | LiNiCoMnO2 |
| Barium Ferrite (BaFe12O19) | Lithium Titanate (Li4Ti5O12) |
| Barium Lead Oxide (BaPbO3) | Lutetium Oxide (Lu2O3) |
| Barium Manganese Oxide (BaMnO3) | Magnesium Oxide (MgO) |
| Barium Strontium Titanate (BaxSr(1-x)TiO3) | Molybdenum Oxide (MoO) |
| Barium Tin Oxide (BaSnO3) | Molybdenum Oxide (MoO3) |
| Barium Titanate (BaTiO3) | Nd(0.67)Ba(0.33)Mn(1)O(3) (NBMO) |
| Barium Zirconate (BaZrO3) | Nd2CuO4 |
| Barium Zirconium Titanate (BaZrxTi(1-x)O3) | NdBa2Cu3O7 |
| Bismuth Ferrite (BiFeO3) | Neodymium Oxide (Nd2O3) |
| Bismuth Ferrite, Chromium Doped (BiFexCr1-xO3) (Cr : BFO) | Nickel Ferrite (NiFe2O4) |
| Bismuth Ferrite, Samarium Doped (BixSm(1-x)O3) (Sm : BFO) | Nickel Oxide (NiO) |
| Bismuth Oxide (Bi2O3) | Praseodymium Oxide (Pr6O11) |
| Calcium Copper Oxide (CaCuO2) | PrBa2Cu3O7 (PBCO) |
| Calcium Manganese Oxide (CaMnO2) | PrCoO3 |
| Calcium Titanate (CaTiO3) | PrxCa(1-x)MnO3 (PCMO) |
| Cerium fluoride (CeF3) | Samarium Oxide(Sm2O3) |
| Cerium oxide (CeO2) | Scandium Oxide (Sc2O3) |
| Chromium Oxide (Cr2O3) | ScMnO3 |
| Cobalt Ferrite (CoFe2O4) | Silica Doped Zirconia (ZrO2 + SiO2) |
| Copper Oxide (CuO) | Silicon Dioxide(SiO2) |
| Dysprosium Oxide (Dy2O3) | Silicon Monoxide(SiO) |
| ErBa2Cu3O7 (EBCO) | SmBa2Cu3O7 (SBCO) |
| Erbium Cobalt Oxide (ErCoO3) | SmBa2Cu3O7 (SBCO) |
| Erbium Oxide(Er2O3) | SmScO3 |
| Europium Oxide (Eu2O3) | SrCoO3 |
| Ga2O3 doped ZnO (GZO) | SrCuO2 |
| GaBa2Cu3O7 (GBCO) | SrFe12O19 |
| Gadolinium Oxide (Gd2O3) | SrMnO3 |
| Gd2Zr2O7 (GZO) | SrRuO3 |
| GdCrO3 (GCO) | Strontium Titanate (SrTiO3) |
| GdScO3 (GSO) | Strontium Zirconate (SrZrO3) |
| Hafnium Oxide (HfO2 ) | Tantalum Pentoxide (Ta2O5) |
| Holmium Oxide (Ho2O3) | Terbium Oxide (Tb4O7) |
| Indium Gallium Zinc Oxide (IGZO) | Thulium Oxide (Tm2O3) |
| Indium Oxide (In2O3) | Titanium Dioxide (TiO2) |
| Indium Tin Oxide (ITO) | Titanium Monoxide (TiO) |
| Indium Zinc Oxide (IZO) | Titanium Oxide (Ti2O3) |
| Indium Zinc Oxide (IZO, 90 wt% In2O3 / 10 wt% ZnO) | Titanium Oxide (Ti3O5) |
| Iron Oxide (Fe2O3) | Tungsten Oxide (WO2.9) |
| Iron Oxide (Fe3O4) | Tungsten Oxide (WO3) |
| La0.67Ba0.33MnO3 (LBMO) | Vanadium Pentoxide (V2O5) |
| La0.67Sr0.33MnO3 (LSMO) | Y3Fe5O12 |
| Lanthanum Aluminate(LaAl2O3) | YAlO3 |
| LaSrNiO3 (LSNO) | YbMnO3 |
| LaxBa(1-x)CoO3 (LBCO) | YMnO3 |
| LaxCa(1-x)CoO3 (LCCO) | Ytterbium Oxide (Yb2O3) |
| LaxCa(1-x)MnO3 (LCMO) | Yttrium Barium Copper Oxide (YBCO, YBa2Cu3O7) |
| LaxSr(1-x)CoO3 (LSCO) | Yttrium oxide(Y2O3) |
| LaxSr(1-x)FeO3 (LSFO) | Zinc oxide (ZnO) |
| LaxSr(1-x)MnO3 (LSMO) | Zinc Oxide, Aluminum Doped (AZO) |
| LaxSr(1-x)TiO3 (LSTO) | Zirconium oxide (ZrO2) |
| LaxSr(2-x)CuO4 (LSCO) | ZnS |
| Lead Oxide (PbO) | ZrO2 Doped with Titanium (Ti-ZrO2) |
| Lead Titanate (PbTiO3) | ZrO2 -Y2O3 Stabilized (YSZ) |
| Lead Zirconate (PbZrO3) |
Shop Nitride Ceramic Sputtering Targets
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Aluminum Nitride (AlN) |
Silicon Nitride (Si3N4) |
|
Boron Nitride(BN) |
Tantalum Nitride (TaN) |
|
Gadolinium Nitride (GdN) |
Titanium Carbo-Nitride (TiCN) |
|
Hafnium Nitride(HfN) |
Titanium Nitride(TiN) |
|
Niobium Nitride (NbN) |
Zirconium Nitride (ZrN) |
Shop Carbide Ceramic Sputtering Targets
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Boron Carbide(B4C) |
Titanium Carbo-Nitride (TiCN) |
|
Chromium Carbide (Cr3C2) |
Tungsten Carbide (W2C) |
|
Hafnium Carbide (HfC) |
Tungsten Carbide (WC) |
|
Molybdenum Carbide (Mo2C) |
Tungsten Carbide Doped with Nickel (Ni-WC) |
|
Niobium Nitride (NbC) |
Tungsten Carbide Doped with Cobalt (Co-WC) |
|
Silicon Carbide (SiC) |
Vanadium Carbide (VC) |
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Tantalum Carbide (TaC) |
Zirconium Carbide (ZrC) |
|
Titanium Carbide (TiC) |
|
Shop Fluoride Ceramic Sputtering Targets
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Aluminum Fluoride (AlF3) |
Lithium Fluoride (LiF) |
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Barium Fluoride (BaF2) |
Magnesium Fluoride (MgF2) |
|
Cadmium Fluoride (CdF2) |
Neodymium Fluoride(NdF3) |
|
Calcium Fluoride(CaF2) |
Potassium Fluoride (KF) |
|
Cerium Fluoride (CeF3) |
Praseodymium Fluoride (PrF3) |
|
Cryolite (Na3AlF6) |
Sodium Fluoride (NaF) |
|
Dysprosium Fluoride (DyF3) |
Strontium Fluoride (SrF3) |
|
Erbium Fluoride (ErF3) |
Samarium Fluoride (SmF3) |
|
Hafnium Fluoride (HfF4) |
Thorium Tetrafluoride (ThF4) |
|
Lanthanum Fluoride(LaF3) |
Ytterbium Fluoride (YbF3) |
|
Lead Fluoride (PbF2) |
Yttrium Fluoride (YF3) |
Shop Silicide Ceramic Sputtering Targets
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Chromium Silicide (CrSi2) |
Tantalum Silicide (Ta5Si3) |
|
Chromium Silicide (Cr2Si) |
Tantalum Silicide (TaSi2) |
|
Cobalt Silicide (Co3Si) |
Titanium Silicide(Ti5Si3) |
|
Hafnium Silicide (HfSi2) |
Titanium Silicide(TiSi2) |
|
Molybdenum Silicide(Mo5Si3) |
Tungsten Silicide (WSi2) |
|
Molybdenum Silicide(MoSi2) |
Tungsten Sulfide (WS2) |
|
Nickel Silicide (NiSi) |
vanadium Silicide (V3Si) |
|
Niobium Silicide (Nb5Si3) |
Vanadium Silicide (VSi2) |
|
Niobium Silicide(NbSi2) |
Zirconium Silicide (ZrSi2) |
Shop Sulfide Ceramic Sputtering Targets
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Arsenic Sulfide (As2S3) |
Manganese Sulfide(MnS2) |
|
Antimony Sulfide (Sb2S3) |
Molybdenum Sulfide (MoS2) |
|
Cadmium Sulfide (CdS ) |
Lead Sulfide (PbS) |
|
Indium Sulfide (In2S3) |
Zinc Sulfide (ZnS) |
|
Iron Sulfide(FeS) |
Tungsten Sulfide (WS2) |
Shop Boride Ceramic Sputtering Targets
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Chromium Boride (Cr2B) |
Neodymium Diboride (NdB2) |
|
Chromium Diboride (CrB2) |
Tantalum Boride (TaB) |
|
Chromium Boride (CrB) |
Tantalum Diboride (TaB2) |
|
Chromium Boride (Cr5B3) |
Titanium Diboride (TiB2) |
|
Hafnium Boride (HfB2) |
Tungsten Boride (WB) |
|
Iron Boride (FeB) |
Tungsten Diboride (WB2) |
|
Lanthanum Hexaboride (LaB6) |
Vanadium Boride (VB) |
|
Molybdenum Boride (Mo2B) |
Vanadium Diboride (VB2) |
|
Molybdenum Boride (Mo2B5) |
Zirconium Diboride (ZrB2) |
|
Neodymium Boride (NdB) |
|
Shop Selenide Ceramic Sputtering Targets
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Bismuth Selenide (Bi2Se3) |
Molybdenum Selenide (MoSe2) |
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Cadmium Selenide (CdSe) |
Niobium Selenide (NbSe2) |
|
Gallium Selenide (Ga2Se3) |
Tantalum Selenide (TaSe2) |
|
Indium Selenide (In2Se3) |
Tungsten Selenide (WSe2) |
|
Lead Selenide (PbSe) |
Zinc Selenide (ZnSe) |
Shop Telluride Sputtering Targets
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Aluminum Telluride (Al2Te3) |
Niobium Telluride (NbTe2) |
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Cadmium Telluride (CdTe) |
Tantalum Telluride ( TaTe2) |
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Lead Telluride (PbTe) |
Tungsten Telluride (WTe2) |
|
Molybdenum Telluride (MoTe2) |
Zinc Telluride (ZnTe) |
Shop Antimonide Sputtering Targets
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Indium Antimonide (InSb) |
Nickel Antimonide (NiSb) |
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Gallium Antimonide (GaSb) |
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Shop Arsenide Sputtering Targets
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Indium Arsenide (InAs) |
Gallium Arsenide (GaAs) |
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Tin Arsenide (SnAs) |
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