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Ceramic Target Materials for Sputtering or Laser Ablation

Ceramic Target Materials for Sputtering or Laser Ablation - The Most Comprehensive Supply of Ceramic Targets
  • MSE Supplies can customize ceramic targets with specific chemical compositions and geometric sizes
  • Sizes and shapes: A comprehensive range of sizes are available to accommodate the requirements of most popular deposition tools.
  • Typical sizes: 1" or 2" diameter, or larger
  • Typical Purity: 99%, 99.9%, 99.95%, 99.99%, or higher purity
  • Applications: physical vapor deposition (PVD) of thin films, laser ablation deposition (PLD), magnetron sputtering for semiconductor, display, LED and photovoltaic devices.
  • Each target can be designed to fit customer specified backing plates or cups with either indium/tin or silver epoxy bonding. 
  • For product quotation, please email: info@msesupplies.com
  • For technical questions: tech@msesupplies.com

 

QUALITY CONTROL OF MSE SUPPLIES CERAMIC SPUTTERING TARGETS

Our ceramic processing and fabrication facilities are equipped with advanced analytical and test equipment.  Our quality engineers monitor and verify product quality before shipping products to our customers. 

    

  • Glow Discharge Mass Spectroscopy (GDMS)
  • Atomic Emission Spectroscopy (AES)
  • Atomic Absorption Spectroscopy (AAS)
  • Scanning Electron Microscopy (SEM)
  • X-ray Diffraction (XRD)
  • C-SCAN Nondestructive Testing
  • Wet Chemistry

 

 

Oxide Ceramic Sputtering Targets

Aluminum  Oxide (Al2O3) Lead Zirconate Titanate (Pb[Zr(x)Ti(1-x)]O3) (PZT)
Antimony : Tin Dioxide (Sb:SnO2) (ATO) Lead  Zirconate (PbZrO3)
Antimony  Oxide (Sb2O3) Li3PO4
Barium Bismuth Oxide (BaBiO3) Li4Ti5O12
Barium Calcium Titanate (BaCaxTi(1-x)O3) LiFePO4
Barium Cobalt Oxide (BaCuO2) LiMn2O3
Barium Copper Oxide (BaCoO3) LiNiCoMnO2
Barium Ferrite (BaFe12O19) Lithium Titanate (Li4Ti5O12)
Barium Lead Oxide (BaPbO3) Lutetium Oxide (Lu2O3)
Barium Manganese Oxide (BaMnO3) Magnesium Oxide (MgO)
Barium Strontium Titanate (BaxSr(1-x)TiO3) Molybdenum Oxide (MoO)
Barium Tin Oxide (BaSnO3) Molybdenum Oxide (MoO3)
Barium Titanate (BaTiO3) Nd(0.67)Ba(0.33)Mn(1)O(3) (NBMO)
Barium Zirconate (BaZrO3) Nd2CuO4
Barium Zirconium Titanate (BaZrxTi(1-x)O3) NdBa2Cu3O7
Bismuth Ferrite (BiFeO3) Neodymium Oxide (Nd2O3)
Bismuth Ferrite, Chromium Doped (BiFexCr1-xO3) (Cr : BFO) Nickel Ferrite (NiFe2O4)
Bismuth Ferrite, Samarium Doped (BixSm(1-x)O3) (Sm : BFO) Nickel Oxide (NiO)
Bismuth Oxide (Bi2O3) Praseodymium Oxide (Pr6O11)
Calcium Copper Oxide (CaCuO2) PrBa2Cu3O7 (PBCO)
Calcium Manganese Oxide (CaMnO2) PrCoO3
Calcium Titanate (CaTiO3) PrxCa(1-x)MnO3 (PCMO)
Cerium fluoride (CeF3) Samarium Oxide(Sm2O3)
Cerium oxide (CeO2) Scandium Oxide (Sc2O3)
Chromium Oxide (Cr2O3) ScMnO3
Cobalt Ferrite (CoFe2O4) Silica Doped Zirconia (ZrO2 + SiO2)
Copper Oxide (CuO) Silicon Dioxide(SiO2)
Dysprosium Oxide (Dy2O3) Silicon Monoxide(SiO)
ErBa2Cu3O7 (EBCO) SmBa2Cu3O7 (SBCO)
Erbium Cobalt Oxide (ErCoO3) SmBa2Cu3O7 (SBCO)
Erbium Oxide(Er2O3) SmScO3
Europium Oxide (Eu2O3) SrCoO3
Ga2O3 doped ZnO (GZO) SrCuO2
GaBa2Cu3O7 (GBCO) SrFe12O19
Gadolinium Oxide (Gd2O3) SrMnO3
Gd2Zr2O7 (GZO) SrRuO3
GdCrO3 (GCO) Strontium Titanate (SrTiO3)
GdScO3 (GSO) Strontium Zirconate (SrZrO3)
Hafnium Oxide  (HfO2 ) Tantalum Pentoxide (Ta2O5)
Holmium Oxide (Ho2O3) Terbium Oxide (Tb4O7)
Indium Gallium Zinc Oxide (IGZO) Thulium Oxide (Tm2O3)
Indium Oxide (In2O3) Titanium Dioxide (TiO2)
Indium Tin Oxide (ITO) Titanium Monoxide (TiO)
Indium Zinc Oxide (IZO) Titanium Oxide (Ti2O3)
Indium Zinc Oxide (IZO, 90 wt% In2O3 / 10 wt% ZnO) Titanium Oxide (Ti3O5)
Iron Oxide (Fe2O3) Tungsten Oxide (WO2.9)
Iron Oxide (Fe3O4) Tungsten Oxide (WO3)
La0.67Ba0.33MnO3 (LBMO) Vanadium Pentoxide (V2O5)
La0.67Sr0.33MnO3 (LSMO) Y3Fe5O12
Lanthanum Aluminate(LaAl2O3) YAlO3
LaSrNiO3 (LSNO) YbMnO3
LaxBa(1-x)CoO3 (LBCO) YMnO3
LaxCa(1-x)CoO3 (LCCO) Ytterbium Oxide (Yb2O3)
LaxCa(1-x)MnO3 (LCMO) Yttrium Barium Copper Oxide (YBCO, YBa2Cu3O7)
LaxSr(1-x)CoO3 (LSCO) Yttrium oxide(Y2O3)
LaxSr(1-x)FeO3 (LSFO) Zinc oxide (ZnO)
LaxSr(1-x)MnO3 (LSMO) Zinc Oxide, Aluminum Doped (AZO)
LaxSr(1-x)TiO3 (LSTO) Zirconium oxide (ZrO2)
LaxSr(2-x)CuO4 (LSCO) ZnS
Lead Oxide (PbO) ZrO2 Doped with Titanium (Ti-ZrO2)
Lead Titanate (PbTiO3) ZrO2 -Y2O3 Stabilized (YSZ)
Lead Zirconate (PbZrO3)  

Nitride Ceramic Sputtering Targets

Aluminum Nitride (AlN)

Silicon Nitride (Si3N4)

Boron Nitride(BN)

Tantalum Nitride (TaN)

Gadolinium Nitride (GdN)

Titanium Carbo-Nitride (TiCN)

Hafnium Nitride(HfN)

Titanium Nitride(TiN)

Niobium Nitride (NbN)

 Zirconium Nitride (ZrN)

 

Carbide Ceramic Sputtering Targets

Boron Carbide(B4C)

Titanium Carbo-Nitride (TiCN)

Chromium Carbide (Cr3C2)

Tungsten Carbide (W2C)

Hafnium Carbide (HfC)

Tungsten Carbide (WC)

Molybdenum Carbide (Mo2C)

Tungsten Carbide Doped with Nickel (Ni-WC)

Niobium Nitride (NbC)

Tungsten Carbide Doped with Cobalt (Co-WC)

Silicon Carbide (SiC)

Vanadium Carbide (VC)

Tantalum Carbide (TaC)

Zirconium Carbide (ZrC)

Titanium Carbide (TiC)

 

 

Fluoride Ceramic Sputtering Targets

Aluminum Fluoride (AlF3)

Lithium Fluoride (LiF)

Barium Fluoride (BaF2)

Magnesium Fluoride  (MgF2)

Cadmium Fluoride (CdF2)

Neodymium Fluoride(NdF3)

Calcium Fluoride(CaF2)

Potassium Fluoride (KF)

Cerium Fluoride (CeF3)

Praseodymium Fluoride (PrF3)

Cryolite (Na3AlF6)

Sodium Fluoride (NaF)

Dysprosium Fluoride (DyF3)

Strontium Fluoride (SrF3)

Erbium Fluoride (ErF3)

Samarium Fluoride (SmF3)

Hafnium Fluoride (HfF4)

 Thorium Tetrafluoride (ThF4)

Lanthanum  Fluoride(LaF3)

Ytterbium Fluoride (YbF3)

Lead Fluoride (PbF2)

Yttrium Fluoride (YF3)

 

Silicide Ceramic Sputtering Targets

Chromium Silicide (CrSi2)

Tantalum Silicide (Ta5Si3)

Chromium Silicide (Cr2Si)

Tantalum Silicide (TaSi2)

Cobalt Silicide (Co3Si)

Titanium Silicide(Ti5Si3)

Hafnium Silicide (HfSi2)

Titanium Silicide(TiSi2)

Molybdenum Silicide(Mo5Si3)

Tungsten Silicide (WSi2)

Molybdenum Silicide(MoSi2)

Tungsten Sulfide (WS2)

Nickel Silicide (NiSi)

vanadium Silicide (V3Si)

Niobium Silicide (Nb5Si3)

Vanadium Silicide (VSi2)

Niobium Silicide(NbSi2)

Zirconium Silicide (ZrSi2)


Sulfide Ceramic Sputtering Targets

Arsenic Sulfide (As2S3)

Manganese Sulfide(MnS2)

Antimony Sulfide (Sb2S3)

Molybdenum Sulfide (MoS2)

Cadmium  Sulfide (CdS )

Niobium Sulfide (NbS1.75)

Indium Sulfide (In2S3)

Tantalum Sulfide (TaS2)

Iron Sulfide(FeS)

Tungsten Sulfide (WS2)

Lead Sulfide (PbS)

Zinc Sulfide (ZnS)


Boride Ceramic Sputtering Targets

Chromium Boride (Cr2B)

Neodymium Diboride (NdB2)

Chromium Diboride (CrB2)

Tantalum Boride (TaB)

Chromium Boride (CrB)

Tantalum Diboride (TaB2)

Chromium Boride (Cr5B3)

Titanium Diboride (TiB2)

Hafnium Boride (HfB2)

Tungsten Boride (WB)

Iron Boride (FeB)

Tungsten Diboride (WB2)

Lanthanum Hexaboride (LaB6)

Vanadium Boride (VB)

Molybdenum Boride (Mo2B)

Vanadium Diboride (VB2)

Molybdenum Boride (Mo2B5)

Zirconium Diboride (ZrB2)

Neodymium Boride (NdB)

 

 

Selenide Ceramic Sputtering Targets

Bismuth Selenide  (Bi2Se3)

Molybdenum Selenide (MoSe2)

Cadmium Selenide (CdSe)

Niobium Selenide (NbSe2)

Gallium Selenide (Ga2Se3)

Tantalum Selenide (TaSe2)

Indium Selenide (In2Se3)

Tungsten Selenide (WSe2)

Lead Selenide (PbSe)

Zinc Selenide (ZnSe)

 

Telluride Sputtering Targets

Aluminum Telluride (Al2Te3)

Niobium Telluride (NbTe2)

Cadmium Telluride (CdTe)

Tantalum Telluride ( TaTe2)

Lead Telluride (PbTe)

Tungsten Telluride (WTe2)

Molybdenum Telluride (MoTe2)

Zinc Telluride (ZnTe)

 

Antimonide Sputtering Targets

Indium Antimonide (InSb)

Nickel Antimonide (NiSb)

Gallium Antimonide (GaSb)

 

 

Arsenide Sputtering Targets

Indium Arsenide (InAs)

Gallium Arsenide (GaAs)

Tin Arsenide (SnAs)