MSE PRO Lab Scale Vacuum Plasma Cleaner
MSE PRO™ Lab Scale Vacuum Plasma Cleaner
MSE Supplies offers Lab Scale Vacuum Plasma Cleaner. The vacuum plasma cleaning machine operates at a processing temperature of 50°C or below, ensuring no thermal impact on the sample surface. Its treatment effect is uniformly stable, remaining effective for extended periods after conventional sample treatment. It is suitable for various sample shapes, and can also clean the internal parts of solid samples. For complex shapes, vacuum plasma cleaning provides a suitable cleaning solution.
Technical Specifications
Dimension (WxDxH) | 560mm x 540mm x 550mm |
Weight | ~70kg (without vacuum pump) |
Chamber Material | Stainless Steel |
Chamber Capacity | 5L |
Chamber Dimension (φ x D) | 150mm x 270mm |
Chamber Temperature | <35℃ |
Cooling Method | Forced air cooling |
Power Supply | 110V/60Hz |
Power | 13.56MHz Radio Frequency, 200W |
Power Range | 10%-100% adjustable |
Time Range | 1-99999s |
Process Gas Line | MFC control 2 channels |
Flow Rate |
10-100cc/min |
Vacuum Level | 1-30Pa |
Vacuum Pump | MA0757 |
*Please contact us for detail specification and optional items.