Customized Silicon Carbide (SiC) Boat for Wafer Handling
To better serve you, we would like to discuss your specific requirement, Please Contact Us for a quote.
MSE Supplies offers customized silicon carbide (SiC) wafer boat. It is typically made from a high-purity form of silicon carbide. It is designed with slots that can hold the wafers in place to prevent the wafers from sliding around during processes. Manufacturing with hard and durable material, the SiC wafer boat can withstand high temperatures and chemical exposure. It is used in various semiconductor manufacturing processes, including crystal growth, diffusion, ion implantation, and etching. They are an important tool for ensuring the quality and reliability of the wafers. It is widely used in equipment for semiconductor fabrication, industrial machinery, spare parts, etc.
- High chemical resistance
- High temperature resistance (up to 1800°C)
- No particle
- Made of sintered dense silicon carbide material
- Long lasting
- Available in various sizes and shapes
* Most of the SiC wafer boats are custom made. Please provide your drawing and the amount of slots you need for quote.