8 inch Silicon Carbide Wafers 4H-SiC N-Type
8 inch diameter Silicon Carbide (SiC) Wafers Specifications
|
Grade |
Zero MPD Grade |
Dummy Grade |
|
Diameter |
199.5-200 mm |
|
|
Thickness |
500 um +/- 25 um 350 um +/- 25 um |
|
|
Wafer Orientation |
Off axis: 4.0 deg toward <11-20> +/-0.5 deg |
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|
Micropipe Density (MPD) |
<0.5 cm-2 |
<30 cm-2 |
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TTV /Bow /Warp |
<10um /±35um /<70um |
<15um /±50um /<100um |
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Electrical Resistivity (Ohm-cm) |
0.015~0.028 |
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| Notch | {10-10} +/- 5.0 deg | |
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Edge exclusion |
3 mm |
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Surface Roughness |
Optical Polish Ra 1 nm |
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CMP Ra 0.5 nm on the Si face |
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Cracks by high intensity light |
None |
Cumulative length 30 mm, single length 2 mm |
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Hex Plates by high intensity light* |
Cumulative area 0.05 % |
Cumulative area 0.1 % |
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Polytype Areas by high intensity light* |
None |
Cumulative area 3% |
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Scratches by high intensity light** |
None |
5 scratches to 1 x wafer diameter cumulative length |
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Edge chip |
None permitted >0.2mm width and depth |
9 allowed, 1 mm each |
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Contamination by high intensity light |
None |
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Notes:
* Defect limits are applicable to the entire wafer surface except for the edge exclusion area, where defects are present.
** The scratches are checked on the Si face only.
Inside the wafer case, the side with laser marking of the serial number is the Carbon face. The Si face is facing down and the Carbon face is facing up.
The wafer will be available at the end of June.
PROPERTIES OF 4H SILICON CARBIDE CRYSTAL MATERIAL
|
Property |
4H-SiC Single Crystal |
|
Lattice Parameters (Å) |
a=3.076 c=10.053 |
|
Stacking Sequence |
ABCB |
|
Density |
3.21 |
|
Mohs Hardness |
~9.2 |
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Thermal Expansion Coefficient (CTE) (/K) |
4-5 x 10-6 |
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Refraction Index @750nm |
no = 2.61 ne = 2.66 |
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Dielectric Constant |
c ~ 9.66 |
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Doping Type |
N-type or Semi-insulating |
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Thermal Conductivity (W/cm-K @298K) (N-type, 0.02 ohm-cm) |
a~4.2 c~3.7 |
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Thermal Conductivity (W/cm-K @298K) (Semi-insulating type) |
a~4.9 c~3.9
|
|
Band-gap (eV) |
3.23 |
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Break-Down Electrical Field (V/cm) |
3-5 x 106 |
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Saturation Drift Velocity (m/s) |
2.0 x 105 |
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Wafer and Substrate Sizes |
Wafers: 2, 4, 6, 8 inch; smaller substrates: 10x10, 20x20 mm, other sizes are available and can be custom-made upon request |
Price
MSE Supplies offers the best price on the market for high quality SiC wafers and SiC crystal substrates up to six (6) inch diameter. Our price matching policy guarantees you the best price for the SiC crystal products with comparable specifications. CONTACT US today to get your quote.
Customization
Customized SiC crystal products can be made to meet customer's particular requirements and specifications.