Fused silica substrates and quartz windows are made from high purity fused quartz, ground and polished to optical grade on both sides. The fused silica substrates and quartz windows are ideal for use as substrates for thin film deposition and are also suitable for many optical applications because of its excellent optical transmission characteristics. Fused silica windows have excellent chemical resistance against a wide variety of solvents, as well as exceptional heat resistance, with high dimensional stability over a wide temperature range thanks to its ultra-low thermal expansion coefficient.

MSE Supplies offers both standard and custom-made fused silica substrates and quartz windows. Please contact us to discuss your detailed requirements.

Fused silica product forms available: Wafers, Discs, Windows, Tubes, Rods, Sputtering Targets, etc.

Single Crystal Quartz Wafers and Substrates are also available.

Typical surface finish: 60/40 S/D for fused silica optical windows, or epi-ready surface finish for substrates.

Our fused silica products have high purity with the following maximum impurity content specifications:

Grade	Na	Li	Fe	Cu	B	Ti
HPFS	2.0	2.5	0.6	0.5	0.3	2.0

Grade	Al	Ca	Mg	Co	Ni	Mn	Ba	K
HPFS	20	1.5	0.5	0.1	0.1	0.1	-	1.0

Physical Properties

Density: 2.2 g/cm
Coefficient of Thermal Expansion: 5.8*10^-7 cm/cm/k (298 K~573 K)
Softening Point: 1943 K
Annealing Point:1160 K
Youngs Modulus(Pa):7.1*103
Thermochromism: Under constant temperature of 1140 degrees, keep annealing for 30 minutes without discoloration.

Transmittance of standard fused silica plate of 9mm thickness. >90% at 275 nm wavelength.

transmittance of fused silica

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Uncoated Glass Substrates