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Customized SiC Epitaxial Wafers on SiC Substrates

To better serve you, we would like to discuss your specific requirement, Please Contact Us for a quote.

Customized silicon carbide SiC epitaxial wafers are provided by MSE Supplies to meet your specific requirements.  We are always happy to discuss your project needs with our scientists and engineers. 

SiC epitaxial wafers have the advantages of operating under high-voltage, high electric current, and at high temperatures compared to semiconductor devices based on silicon. These unique features of SiC epitaxial wafers lead to the miniaturization of devices, enabling smaller and lighter power control modules to be made. 

PROPERTIES OF SILICON CARBIDE SUBSTRATE WAFERS

Property

4H-SiC Single Crystal

6H-SiC Single Crystal

Lattice Parameters (Å)

a=3.076

c=10.053

a=3.073

c=15.117

Stacking Sequence

ABCB

ABCACB

Density

3.21

3.21

Mohs Hardness

~9.2

~9.2

Thermal Expansion Coefficient (CTE) (/K)

4-5 ×10-6

4-5 ×10-6

Refraction Index @750nm

no = 2.61

ne = 2.66

no = 2.60

ne = 2.65

Dielectric Constant

c ~ 9.66

c ~ 9.66

Doping Type

N-type or Semi-insulating

N-type or Semi-insulating

Thermal Conductivity (W/cm·K @298K)

(N-type, 0.02 ohm·cm)

a~4.2

c~3.7

  

Thermal Conductivity (W/cm·K @298K)

(Semi-insulating type)

a~4.9

c~3.9

 

a~4.6

c~3.2

 

Band-gap (eV)

3.23

3.02

Break-Down Electrical Field (V/cm)

3-5×106

3-5×106

Saturation Drift Velocity (m/s)

2.0 x 105

2.0 x 105

Wafer and Substrate Sizes

Wafers: 2”, 3”, 4”, 6”; small substrates: 10x3, 10x5, 10x10, 15x15, 20x15, 20x20 mm, other sizes are available and can be custom-made upon request

Product Grades

A Grade – Zero micropipe density (MPD ≤ 1 cm-2)

B Grade – Production grade (MPD ≤ 5 cm-2)

C Grade – Research grade (MPD ≤ 15 cm-2)

D Grade – Dummy grade (MPD ≤ 50 cm-2)

 

Price

MSE Supplies offers the best price on the market for high quality SiC epitaxial wafers up to six (6) inch diameter.  Our price matching policy guarantees you the best price for the SiC epi wafers with comparable specifications.  CONTACT US today to get your quote. 

Customization

Customized SiC crystal products can be made to meet customer's particular requirements and specifications.  


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