Indium Gallium Zinc Oxide Sputtering Targets (bonded assemblies)

Indium Gallium Zinc Oxide (IGZO) is a semiconducting material, consisting of indium (In), gallium (Ga), zinc (Zn) and oxygen (O).

Both InGaZnO₄and In₂Ga₂ZnO₇compositions are available upon request. High-mobility indium gallium zinc oxide (IGZO) thin-film transistors (TFTs) are achieved through low-temperature crystallization enabled via a reaction with a transition metal catalytic layer. IGZO's advantage over zinc oxide is that it can be deposited as a uniform amorphous phase while retaining the high carrier mobility common to oxide semiconductors. The applications of IGZO thin films include transparent conductive oxide films, LED display, MEMS devices, etc. IGZO sputtering targets with customized sizes and shapes can be?ÿsupplied by MSE Supplies according to the drawings provided by the customer.

Each target is manufactured by hot pressing, followed by Indium bonding to an oxygen-free Copper backing plate.

Material Name	Indium Gallium Zinc Oxide
Symbol	IGZO, InGaZnO₄, In₂Ga₂ZnO₇
Purity	99.99%, 4N

Theoretical Density (g/cm3)	InGaZnO₄-6.12 g/cm³, In₂Ga₂ZnO₇-6.5g/cm³
Relative Density	> 90%
Z Ratio	N/A
Sputter	RF, DC
Max Power Density (Watts/Square Inch)	N/A
Type of Bonding	Indium
Backing Plate	Copper (Cu), oxygen free copper, 1/8" thickness
Package	Vacuum sealed in plastic bag

ICP-AES analysis of impurities (in ppm)

References:

High performance thin film transistors with cosputtered amorphous indium gallium zinc oxide channel. [PDF download],Appl. Phys. Lett. 91, 113505 (2007); https://doi.org/10.1063/1.2783961, Jae Kyeong Jeong, Jong Han Jeong, Hui Won Yang, Jin-Seong Park, Yeon-Gon Mo, and Hye Dong Kim

Processing effects on the stability of amorphous indium gallium zinc oxide thin-film transistors, Journal of Non-Crystalline Solids, Volume 354, Issues 19ƒ25, 1 May 2008, Pages 2826-2830, Hai Q. Chiang, Brian R.McFarlane, David Hong, Rick E. Presley, John F.Wager

MSE Supplies is a premier supplier of quality manufactured sputtering targets. We supply custom chemical compositions, purity and sizes. Our wide variety of targets are grouped by high purity metals, alloys, and ceramics. Our pricing is competitive and we consistently offer price matching for our customers.