Both standard and custom-made high purity (>99.99%, trace metal basis) carbon (graphite) sputtering targets are available.

To add a Cu Backing Plate with Indium Bonding for Sputtering Targets

Typical specifications of graphite blocks

Density: 1.8 g/cm3
Electrical resistivity: 15 uOhm.m
Impurity: <100 ppm
Porosity: 20%
Hardness HSD: 40
Bending strength: 40 MPa
Compressive strength: 60 MPa

Carbon (Graphite) (C) Properties

Material Type	Carbon
Symbol	C
Atomic Weight	12.0107
Purity (%)	>99.99 (trace metal basis)
Color/Appearance	Black, Non-Metallic
Thermal Conductivity	140 W/m.K
Melting Point (°C)	~3,652
Coefficient of Thermal Expansion	7.1 x 10^-6/K

Theoretical Density (g/cm³)	2.25
Z Ratio	3.26
Sputter	PDC
Max Power Density (Watts/Square Inch)	80
Type of Bond	Indium Bonding
Comments	E-beam preferred. Arc evaporation. Poor film adhesion.

Available Products

Pure Carbon

Name

Purity

Carbon (Graphite)

Sizes and Shapes can be custom made

>99.99% (trace metal basis)

Carbon Alloys

Name		Composition
Aluminum Titanium Carbon Alloy	AlTiC Alloy	5% Ti - 0.2% C
Aluminum Titanium Carbon Alloy	AlTiC Alloy	3% Ti - 0.2% C
Aluminum Titanium Carbon Alloy	AlTiC Alloy	3% Ti - 0.15% C

Carbon Compounds

Name	Formula
Boron Carbide	B₄C
Chromium Carbide	Cr₃C₂
Chromium Carbonitride	CrCN
Hafnium Carbide	HfC
Molybdenum Carbide	Mo₂C
Niobium Carbide	NbC
Silicon Carbide	SiC
Tantalum Carbide	TaC
Titanium Carbide	TiC
Titanium Carbonitride	TiCN
Tungsten Carbide	WC
Tungsten Carbide	W₂C
Tungsten Carbide - Cobalt	WC - 6 wt. % Co
Tungsten Carbide - Cobalt	W₂C - 12 wt. % Co
Vanadium Carbide	VC
Zirconium Carbide	ZrC