Ruthenium (Ru) is an inert rare transition metal. Most ruthenium produced is used in wear-resistant electrical contacts, thick-film resistors, platinum alloys and chemistry catalyst. A new application of ruthenium is as the optical layer for extreme ultraviolet photomasks.

The dimensions and purities can be customized upon request. Please contact us for customization or bulk orders.

Name	Ruthenium
Chemical Formula	Ru
CAS #	7440-18-8
Atomic Number	44
Molecule Weight (g/mol)	101.07
Color/Appearance	Silvery White Metallic
Purity	≥99.95%, 3N5
Thermal Conductivity (W/m.K)	120
Melting Point (°C)	2,310
Coefficient of Thermal Expansion (/K)	6.4 x 10^-6
Theoretical Density (g/cm³)	12.3
Z Ratio	0.182
E-Beam	Poor
Temp. (°C) for Given Vap. Press. (Torr)	10^-8: 1,780 10^-6: 1,990 10^-4: 2,260

MSE Supplies offers a variety of crucibles for evaporation materials. We can customize the dimensions based on your requirements.

References:

1. Atomic layer deposition of ruthenium surface-coating on porous platinum catalysts for high-performance direct ethanol solid oxide fuel cells. Journal of Power Sources 291 (2015): 239-245.

2. Improved Ru/Si multilayer reflective coatings for advanced extreme-ultraviolet lithography photomasks. In Extreme Ultraviolet (EUV) Lithography VII, vol. 9776, pp. 364-373. SPIE, 2016.

3. Reflectance and optical constants of evaporated ruthenium in the vacuum ultraviolet from 300 to 2000 Å. JOSA 64, no. 4 (1974): 423-428.

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