Compact Magnetron Ion Sputtering Coater for SEM Sample Preparation
Compact Magnetron Ion Sputtering Coater for SEM Sample Preparation
MSE Supplies offers a compact magnetron sputtering coater that is ideal for lab SEM sample preparation. It is widely used to coat non-conductive SEM samples with Au for better imaging. It is also excellent for surface treatment and coating when using other sputtering targets. Low vacuum, less than 3Pa can be achieved quickly when using proper vacuum pumps. It generates much less heat and avoids plasma damage to the substrate sample. It is user friendly and easy to operate using touch panel control.
Vacuum pump is not included. You can order Vacuum pump with additional cost.
Brand: MSE PRO™
Manufacturer: MSE Supplies LLC
MSE Supplies is a leading Sputtering Targets supplier and offers custom-made high purity sputtering targets.
Technical Specifications
| SKU# | MA0600 |
| Chamber Size | ~Ø 120 *110 mm |
| Chamber Material | Quartz Glass |
| Compatible Target Size | Ø 50 *0.1-2 mm |
| Sputtering Source Power | DC magnetron, Max. 20 W, Max. 60 mA, 0-800 V |
| Sample stage size | 2 inch diameter |
| Vacuum Limit | <2 Pa |
| Operation Vacuum | 5-10 Pa |
| Color | Light blue/Navy Blue |
| Sputtering Time | Programable |
| Operation Method | Control Touch Panel |
| Weight | about 18 kg |
| Dimension | 250*360*306 mm |
| Supply Voltage | 110V( 220v, other voltages are possible on request) |
| Total Electric Power | <500 W |
| Cooling Method | Air cooled |
| Warranty | One year limited warranty with lifetime product support |
# Use air as sputtering gas. All in one device- No need to connect Ar gas (no Ar gas inlet connection )
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