MSE Supplies offers a High Vacuum Magnetron Ion Sputtering Coater with both Direct Current (DC) and Radio Frequency (RF) Model. High Vacuum Magnetron Ion Sputtering Coater provides the most stable sputtering environment and achieves the basic experimental conditions of magnetron sputtering in a very short period of time. It uses high quality and constant power magnetron sputtering power supply to ensure constant coating deposition rate. The use of magnetron cathodes is also effective in reducing plasma exposure to the sample, thermal effects and ion bombardment damage. The DC model is more suitable for the coating of conductive materials while the RF model allows sputtering both conductive or non-conductive substance on specimen without accumulating discharge on the sample surface. Thus it improves physical vapor deposition (PVD) performance. It is widely used for SEM sample preparation, coating and surface treatment of metals, ceramics, semiconductors, insulators or other kinds of membrane material preparation. It is easy to operate and user friendly. Vacuum Pump and Chiller are included.

Brand: MSE PRO™

Manufacturer: MSE Supplies LLC

MSE Supplies is a leading Sputtering Targets supplier and offers custom-made high purity sputtering targets.

Technical Specifications

SKU#	MA0597
Vacuum Pump Set	(Oil required) Rotary Vacuum Pump+(Oil free) Turbo Molecular Pump set
Rotary Pumping Speed	50Hz: 16m³/h (4.4L/s); 60Hz: 19.2m³/h (5.2L/s)
Turbo Molecular Pumping Speed (L/s)	300
Vacuum Limit (Pa)	5x10^-5
Working Pressure (Pa)	0.5-5
Vacuuming Time (Min)	>10 (to 10^-3Pa)
Vacuum Measure	Measuring range from atmosphere to 10^-6Pa
Gas Control	Gas flow controller
Chamber Size (mm)	Φ 260*200 metal
Magnetron Target Source	Target size 50*3mm Target source: weak magnetic materials
Operation Method	Manual
Weight (kg)	100
Size, LWH, (mm)	610420490
Power Supply	AC 110V 60Hz or 220V 50Hz
Power Consumption (W)	<3000
Cooling Method	Air cooling (pump)+water cooling (sputtering target)
Warranty	One year limited warranty with lifetime product support