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High Purity Metal Sputtering Targets

Available Sputtering Target Dimensions (sizes and shapes)

A comprehensive range of sizes are available to accommodate the requirements of most popular deposition tools.

  • Disk targets, column targets, step wafer targets, plate targets (Dia< 650mm, Thickness> 1mm)
  • Rectangular targets, slice targets, Step rectangular targets (Length <1500mm, Width <300mm, Thickness >1mm)
  • Tubular targets / rotation sputtering target (Outer Diameter < 300mm, Thickness > 2mm)

Purity

99.9% (3N), 99.95% (3N5), 99.99% (4N), 99.999% (5N), 99.9995% (5N5), 99.9999% (6N)

Applications

physical vapor deposition (PVD) of thin films, laser ablation deposition (PLD), magnetron sputtering for semiconductor, display, LED and photovoltaic devices.

Each target can be designed to fit customer specified backing plates or cups with either indium/tin or silver epoxy bonding.  Bonding service is available on oxygen free copper backing plate.

For product quotation, please email: sales@msesupplies.com

For technical questions: tech@msesupplies.com

Click here for a comprehensive list of all Sputtering Targets>


Cerium Sputtering Target Ce,  MSE Supplies

Cerium Sputtering Target Ce

Dysprosium Sputtering Target Dy,  MSE Supplies

Dysprosium Sputtering Target Dy

Erbium Sputtering Target Er,  MSE Supplies

Erbium Sputtering Target Er

Europium Sputtering Target Eu,  MSE Supplies

Europium Sputtering Target Eu

Gadolinium Sputtering Target Gd,  MSE Supplies

Gadolinium Sputtering Target Gd

£33400
Holmium Sputtering Target Ho,  MSE Supplies

Holmium Sputtering Target Ho

Lanthanum Sputtering Target La,  MSE Supplies

Lanthanum Sputtering Target La

Lutetium Sputtering Target Lu,  MSE Supplies

Lutetium Sputtering Target Lu

Neodymium Sputtering Target Nd,  MSE Supplies

Neodymium Sputtering Target Nd

£24700
Praseodymium Sputtering Target Pr,  MSE Supplies

Praseodymium Sputtering Target Pr

Samarium Sputtering Target Sm,  MSE Supplies

Samarium Sputtering Target Sm

Scandium Sputtering Target Sc,  MSE Supplies

Scandium Sputtering Target Sc

£58600
Terbium Sputtering Target Tb,  MSE Supplies

Terbium Sputtering Target Tb

Thulium Sputtering Target Tm,  MSE Supplies

Thulium Sputtering Target Tm

Ytterbium Sputtering Target Yb,  MSE Supplies

Ytterbium Sputtering Target Yb

Yttrium Sputtering Target Y,  MSE Supplies

Yttrium Sputtering Target Y

£15200