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High Purity Metal Sputtering Targets

Available Sputtering Target Dimensions (sizes and shapes)

A comprehensive range of sizes are available to accommodate the requirements of most popular deposition tools.

  • Disk targets, column targets, step wafer targets, plate targets (Dia< 650mm, Thickness> 1mm)
  • Rectangular targets, slice targets, Step rectangular targets (Length <1500mm, Width <300mm, Thickness >1mm)
  • Tubular targets / rotation sputtering target (Outer Diameter < 300mm, Thickness > 2mm)

Purity

99.9% (3N), 99.95% (3N5), 99.99% (4N), 99.999% (5N), 99.9995% (5N5), 99.9999% (6N)

Applications

physical vapor deposition (PVD) of thin films, laser ablation deposition (PLD), magnetron sputtering for semiconductor, display, LED and photovoltaic devices.

Each target can be designed to fit customer specified backing plates or cups with either indium/tin or silver epoxy bonding.  Bonding service is available on oxygen free copper backing plate.

For product quotation, please email: sales@msesupplies.com

For technical questions: tech@msesupplies.com

Click here for a comprehensive list of all Sputtering Targets>


Aluminum Sputtering Target Al,  MSE Supplies

Aluminum Sputtering Target Al

£4700
Chromium Sputtering Target Cr,  MSE Supplies

Chromium Sputtering Target Cr

£8300
Germanium Sputtering Target Ge,  MSE Supplies

Germanium Sputtering Target Ge

£7500
Gold Sputtering Target Au,  MSE Supplies

Gold Sputtering Target Au

Nickel Sputtering Target Ni,  MSE Supplies

Nickel Sputtering Target Ni

£7500
Platinum Sputtering Target Pt,  MSE Supplies

Platinum Sputtering Target Pt

Silver Sputtering Target Ag,  MSE Supplies

Silver Sputtering Target Ag

£24300
Tantalum Sputtering Target Ta,  MSE Supplies

Tantalum Sputtering Target Ta

£16600
Tungsten Sputtering Target W,  MSE Supplies

Tungsten Sputtering Target W

£9400