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High Purity Metal Sputtering Targets

Available Sputtering Target Dimensions (sizes and shapes)

A comprehensive range of sizes are available to accommodate the requirements of most popular deposition tools.

  • Disk targets, column targets, step wafer targets, plate targets (Dia< 650mm, Thickness> 1mm)
  • Rectangular targets, slice targets, Step rectangular targets (Length <1500mm, Width <300mm, Thickness >1mm)
  • Tubular targets / rotation sputtering target (Outer Diameter < 300mm, Thickness > 2mm)

Purity

99.9% (3N), 99.95% (3N5), 99.99% (4N), 99.999% (5N), 99.9995% (5N5), 99.9999% (6N)

Applications

physical vapor deposition (PVD) of thin films, laser ablation deposition (PLD), magnetron sputtering for semiconductor, display, LED and photovoltaic devices.

Each target can be designed to fit customer specified backing plates or cups with either indium/tin or silver epoxy bonding.  Bonding service is available on oxygen free copper backing plate.

For product quotation, please email: sales@msesupplies.com

For technical questions: tech@msesupplies.com

Click here for a comprehensive list of all Sputtering Targets>


Aluminum Sputtering Target Al,  MSE Supplies

Aluminum Sputtering Target Al

€5395
Antimony Sputtering Target (Sb),  MSE Supplies

Antimony Sputtering Target (Sb)

€20795
Bismuth Sputtering Target Bi,  MSE Supplies

Bismuth Sputtering Target Bi

€25095
Boron Sputtering Target B,  MSE Supplies

Boron Sputtering Target B

€66095 Save €69500
Cadmium Sputtering Target Cd,  MSE Supplies

Cadmium Sputtering Target Cd

Carbon (Graphite) Sputtering Target C,  MSE Supplies

Carbon (Graphite) Sputtering Target C

€7295
Cerium Sputtering Target Ce,  MSE Supplies

Cerium Sputtering Target Ce

Chromium Sputtering Target Cr,  MSE Supplies

Chromium Sputtering Target Cr

€9495
Cobalt Sputtering Target Co,  MSE Supplies

Cobalt Sputtering Target Co

€9695
Copper Sputtering Target Cu,  MSE Supplies

Copper Sputtering Target Cu

€6895
Dysprosium Sputtering Target Dy,  MSE Supplies

Dysprosium Sputtering Target Dy

Erbium Sputtering Target Er,  MSE Supplies

Erbium Sputtering Target Er

Europium Sputtering Target Eu,  MSE Supplies

Europium Sputtering Target Eu

Gadolinium Sputtering Target Gd,  MSE Supplies

Gadolinium Sputtering Target Gd

€38595
Germanium Sputtering Target Ge,  MSE Supplies

Germanium Sputtering Target Ge

€8695