What to know before you buy
This collection lists carbide sputtering targets for hard, wear-resistant and high temperature thin films. Options include silicon carbide, tungsten carbide, titanium carbide, boron carbide, and carbides of niobium, hafnium, tantalum, vanadium, molybdenum, chromium and iron.
Typical uses differ by material. SiC films serve as hard coatings, protective layers and in wide bandgap semiconductor research. WC, TiC and Cr3C2 are used for wear and corrosion resistant coatings on tools and parts. B4C is light and very hard, and appears in protective and neutron absorbing coatings. HfC and TaC have very high melting points for high temperature studies, and Mo2C is studied as a catalyst.
Because carbide targets are brittle, consider bonding to a copper backing plate if you plan to run at higher power. For more on target choice, see what sputtering target purity and bonding change in thin film quality.
Frequently Asked Questions
Should I sputter carbides with RF or DC power?
Conductive carbides, such as TiC, WC and many refractory carbides, can often run on DC or pulsed DC. SiC and B4C are less conductive and usually need RF. Check your power supply and the target's resistivity before choosing.
Which carbide target suits a wear-resistant coating?
Tungsten carbide, titanium carbide and chromium carbide are common for wear and corrosion resistant films. Film hardness also depends on deposition conditions, including substrate temperature, bias and any reactive gas used.
Should I bond my carbide target to a backing plate?
Bonding helps with brittle carbides, especially at higher power, because it moves heat into the water-cooled backing plate and lowers the risk of cracking. Oxygen-free copper backing plates and indium bonding can be requested through the quote request page.
What details do I need to request a carbide target quote?
Send the material, such as HfC or NbC, plus diameter, thickness, purity and bonding needs through the quote request page. Include your sputtering gun model so the target fits.
How do I order several carbide targets for a project?
List the materials, sizes and quantities on the bulk order request form. Add any bonding requirements to the same request so each target is ready to mount.
