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Sputtering Targets

MSE Supplies is the industry-leading source for sputtering targets. Our vast selection includes high-purity metal, high-purity alloy and ceramic targets. We also produce sputtering targets customized by chemistry, geometry and size to meet your specifications. We also provide SPS equipment for sputtering target manufacturing. Shop online by chemical composition here.

    Antimonide Sputtering Targets

    Antimonide Sputtering Targets (277)

    Arsenide Sputtering Targets

    Arsenide Sputtering Targets (0)

    Boride Ceramic Sputtering Targets

    Boride Ceramic Sputtering Targets (12)

    Carbide Ceramic Sputtering Targets

    Carbide Ceramic Sputtering Targets (11)

    Fluoride Ceramic Sputtering Targets

    Fluoride Ceramic Sputtering Targets (20)

    High Purity Alloy Sputtering Targets

    High Purity Alloy Sputtering Targets (16)

    High Purity Metal Sputtering Targets

    High Purity Metal Sputtering Targets (118)

    MSE PRO Niobium (Nb) Powder, Sputtering Target and Evaporation Material

    MSE PRO Niobium (Nb) Powder, Sputtering Target and Evaporation Material (5)

    Nitride Ceramic Sputtering Targets

    Nitride Ceramic Sputtering Targets (9)

    Oxide Ceramic Sputtering Targets

    Oxide Ceramic Sputtering Targets (43)

    Selenide Ceramic Sputtering Targets

    Selenide Ceramic Sputtering Targets (277)

    Silicide Ceramic Sputtering Targets

    Silicide Ceramic Sputtering Targets (13)

    Sulfide Ceramic Sputtering Targets

    Sulfide Ceramic Sputtering Targets (11)

    Telluride Sputtering Targets

    Telluride Sputtering Targets (11)

    277 Products

    • MSE PRO Selenide Ceramic Sputtering Targets, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Selenide Ceramic Sputtering Targets

      Order upon Request
    • MSE PRO Selenium Sputtering Target Se, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Selenium Sputtering Target Se

      Order upon Request
      From $ 339.95
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    • MSE PRO Silicon Carbide Sputtering Target SiC, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silicon Carbide Sputtering Target SiC

      Order upon Request
      From $ 499.95
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    • MSE PRO Silicon Dioxide Sputtering Target SiO<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silicon Dioxide Sputtering Target SiO2

      Ready to ship
      From $ 94.95
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    • MSE PRO Silicon Nitride Sputtering Target Si<sub>3</sub>N<sub>4</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silicon Nitride Sputtering Target Si3N4

      Order upon Request
      From $ 259.95
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    • MSE PRO Silicon Sputtering Target Si (undoped), Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silicon Sputtering Target Si (undoped)

      Ready to ship
      From $ 120.95
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    • MSE PRO Silicon Sputtering Target Si N-Type, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silicon Sputtering Target Si N-Type

      Order upon Request
      From $ 197.95
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    • MSE PRO Silicon Sputtering Target Si P-Type, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silicon Sputtering Target Si P-Type

      Order upon Request
      From $ 197.95
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    • MSE PRO Silver Copper Sputtering Targets AgCu, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silver Copper Sputtering Targets AgCu

      Order upon Request
    • MSE PRO Silver Sputtering Target Ag, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silver Sputtering Target Ag

      Order upon Request
    • MSE PRO Silver Tin Sputtering Target AgSn, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silver Tin Sputtering Target AgSn

      Order upon Request
    • MSE PRO Sodium Fluoride Sputtering Target NaF, 99.99%, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Sodium Fluoride Sputtering Target NaF, 99.99%

      Order upon Request
      From $ 276.95
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    • MSE PRO Solid Electrolyte, Lithium Phosphate (Li<sub>3</sub>PO<sub>4</sub>) LiPON Sputtering Targets, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Solid Electrolyte, Lithium Phosphate (Li3PO4) LiPON Sputtering Targets

      Order upon Request
      From $ 765.95
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    • MSE PRO Solid Electrolyte, Nb-doped LLZO Sputtering Target for LLZO Thin Films, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Solid Electrolyte, Nb-doped LLZO Sputtering Target for LLZO Thin Films

      Ready to ship
      From $ 1,523.95
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    • MSE PRO Solid Electrolyte, Ta-doped LLZO Sputtering Target for LLZO Thin Films, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Solid Electrolyte, Ta-doped LLZO Sputtering Target for LLZO Thin Films

      Order upon Request
      From $ 1,050.95
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    • MSE PRO Strontium Fluoride Sputtering Target SrF<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Strontium Fluoride Sputtering Target SrF2

      Order upon Request
    • MSE PRO Strontium Titanate Sputtering Target SrTiO<sub>3</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Strontium Titanate Sputtering Target SrTiO3

      Order upon Request
      From $ 642.95
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    • MSE PRO Tantalum Aluminum Sputtering Target TaAl, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Aluminum Sputtering Target TaAl

      Order upon Request
    • MSE PRO Tantalum Boride Sputtering Target TaB, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Boride Sputtering Target TaB

      Order upon Request
    • MSE PRO Tantalum Carbide Sputtering Target TaC, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Carbide Sputtering Target TaC

      Order upon Request
    • MSE PRO Tantalum Nitride Sputtering Target TaN, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Nitride Sputtering Target TaN

      Ready to ship
      From $ 688.95
      $ 772.95 From $ 688.95
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    • MSE PRO Tantalum Pentoxide Sputtering Target Ta<sub>2</sub>O<sub>5</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Pentoxide Sputtering Target Ta2O5

      Order upon Request
      From $ 446.95
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    • MSE PRO Tantalum Selenide Sputtering Target TaSe<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Selenide Sputtering Target TaSe2

      Order upon Request
    • MSE PRO Tantalum Silicide Sputtering Target TaSi<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Silicide Sputtering Target TaSi2

      Order upon Request