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Sputtering Targets

MSE Supplies is the industry-leading source for sputtering targets. Our vast selection includes high-purity metal, high-purity alloy and ceramic targets. We also produce sputtering targets customized by chemistry, geometry and size to meet your specifications. We also provide SPS equipment for sputtering target manufacturing. Shop online by chemical composition here.

    Antimonide Sputtering Targets

    Antimonide Sputtering Targets (278)

    Arsenide Sputtering Targets

    Arsenide Sputtering Targets (0)

    Boride Ceramic Sputtering Targets

    Boride Ceramic Sputtering Targets (12)

    Carbide Ceramic Sputtering Targets

    Carbide Ceramic Sputtering Targets (11)

    Fluoride Ceramic Sputtering Targets

    Fluoride Ceramic Sputtering Targets (20)

    High Purity Alloy Sputtering Targets

    High Purity Alloy Sputtering Targets (16)

    High Purity Metal Sputtering Targets

    High Purity Metal Sputtering Targets (119)

    MSE PRO Niobium (Nb) Powder, Sputtering Target and Evaporation Material

    MSE PRO Niobium (Nb) Powder, Sputtering Target and Evaporation Material (6)

    Nitride Ceramic Sputtering Targets

    Nitride Ceramic Sputtering Targets (9)

    Oxide Ceramic Sputtering Targets

    Oxide Ceramic Sputtering Targets (43)

    Selenide Ceramic Sputtering Targets

    Selenide Ceramic Sputtering Targets (278)

    Silicide Ceramic Sputtering Targets

    Silicide Ceramic Sputtering Targets (13)

    Sulfide Ceramic Sputtering Targets

    Sulfide Ceramic Sputtering Targets (11)

    Telluride Sputtering Targets

    Telluride Sputtering Targets (11)

    278 Products

    • MSE PRO Tantalum Sputtering Target Ta, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Sputtering Target Ta

      Backordered
      From $ 216.95
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    • MSE PRO Tantalum Sulfide Sputtering Target TaS<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Sulfide Sputtering Target TaS2

      Backordered
    • MSE PRO Tantalum Telluride Sputtering Target TaTe<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Telluride Sputtering Target TaTe2

      Backordered
    • MSE PRO Teflon (PTFE) Sputtering Target, 99.9% Purity, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Teflon (PTFE) Sputtering Target, 99.9% Purity

      Ready to Ship
      From $ 186.95
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    • MSE PRO Tellurium Sputtering Target Te, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tellurium Sputtering Target Te

      Backordered
      From $ 472.95
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    • MSE PRO Terbium Iron Alloy Sputtering Target TbFe, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Terbium Iron Alloy Sputtering Target TbFe

      Backordered
    • MSE PRO Thorium Tetrafluoride Sputtering Target ThF<sub>4</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Thorium Tetrafluoride Sputtering Target ThF4

      Backordered
    • MSE PRO Thulium Oxide Sputtering Target Tm<sub>2</sub>O<sub>3</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Thulium Oxide Sputtering Target Tm2O3

      Backordered
    • MSE PRO Thulium Sputtering Target Tm, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Thulium Sputtering Target Tm

      Backordered
    • MSE PRO Tin Arsenide Sputtering Target SnAs, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tin Arsenide Sputtering Target SnAs

      Backordered
    • MSE PRO Tin Oxide Sputtering Targets SnO<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tin Oxide Sputtering Targets SnO2

      Backordered
      From $ 367.95
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    • MSE PRO Tin Sputtering Target Sn, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tin Sputtering Target Sn

      Ready to Ship
      From $ 150.95
      $ 169.95 From $ 150.95
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    • MSE PRO Titanium Aluminum Sputtering Target TiAl, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Titanium Aluminum Sputtering Target TiAl

      Backordered
    • MSE PRO Titanium Carbide Sputtering Target TiC, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Titanium Carbide Sputtering Target TiC

      Backordered
      From $ 488.95
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    • MSE PRO Titanium Chromium Sputtering Target TiCr, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Titanium Chromium Sputtering Target TiCr

      Backordered
    • MSE PRO Titanium Diboride Sputtering Targets TiB<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Titanium Diboride Sputtering Targets TiB2

      Ready to Ship
      From $ 525.95
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    • MSE PRO Titanium Dioxide Sputtering Target TiO<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Titanium Dioxide Sputtering Target TiO2

      Ready to Ship
      From $ 263.95
      $ 296.95 From $ 263.95
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    • MSE PRO Titanium Monoxide Sputtering Target TiO, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Titanium Monoxide Sputtering Target TiO

      Backordered
    • MSE PRO Titanium Nickel Sputtering Target TiNi, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Titanium Nickel Sputtering Target TiNi

      Backordered
    • MSE PRO Titanium Nitride Sputtering Target TiN, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Titanium Nitride Sputtering Target TiN

      Backordered
      From $ 328.95
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    • MSE PRO Titanium Silicide Sputtering Target TiSi<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Titanium Silicide Sputtering Target TiSi2

      Backordered
    • MSE PRO Titanium Sputtering Target Ti, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Titanium Sputtering Target Ti

      Ready to Ship
      From $ 74.95
      $ 84.95 From $ 74.95
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    • MSE PRO Titanium sputtering target, 4N5 purity, dimension: 6 inches, thickness: 5mm, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Titanium sputtering target, 4N5 purity, dimension: 6 inches, thickness: 5mm

      Backordered
      $ 379.95
    • MSE PRO Tungsten Boride Sputtering Target WB, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tungsten Boride Sputtering Target WB

      Backordered