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Sputtering Targets

MSE Supplies is the industry-leading source for sputtering targets. Our vast selection includes high-purity metal, high-purity alloy and ceramic targets. We also produce sputtering targets customized by chemistry, geometry and size to meet your specifications. We also provide SPS equipment for sputtering target manufacturing. Shop online by chemical composition here.

    Antimonide Sputtering Targets

    Antimonide Sputtering Targets (278)

    Arsenide Sputtering Targets

    Arsenide Sputtering Targets (0)

    Boride Ceramic Sputtering Targets

    Boride Ceramic Sputtering Targets (12)

    Carbide Ceramic Sputtering Targets

    Carbide Ceramic Sputtering Targets (11)

    Fluoride Ceramic Sputtering Targets

    Fluoride Ceramic Sputtering Targets (20)

    High Purity Alloy Sputtering Targets

    High Purity Alloy Sputtering Targets (16)

    High Purity Metal Sputtering Targets

    High Purity Metal Sputtering Targets (119)

    MSE PRO Niobium (Nb) Powder, Sputtering Target and Evaporation Material

    MSE PRO Niobium (Nb) Powder, Sputtering Target and Evaporation Material (6)

    Nitride Ceramic Sputtering Targets

    Nitride Ceramic Sputtering Targets (9)

    Oxide Ceramic Sputtering Targets

    Oxide Ceramic Sputtering Targets (43)

    Selenide Ceramic Sputtering Targets

    Selenide Ceramic Sputtering Targets (278)

    Silicide Ceramic Sputtering Targets

    Silicide Ceramic Sputtering Targets (13)

    Sulfide Ceramic Sputtering Targets

    Sulfide Ceramic Sputtering Targets (11)

    Telluride Sputtering Targets

    Telluride Sputtering Targets (11)

    278 Products

    • MSE PRO Tungsten Carbide Sputtering Target WC, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tungsten Carbide Sputtering Target WC

      Backordered
      From $ 415.95
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    • MSE PRO Tungsten Disulfide Sputtering Target WS<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tungsten Disulfide Sputtering Target WS2

      Backordered
      From $ 524.95
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    • MSE PRO Tungsten Oxide Sputtering Target WO<sub>3</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tungsten Oxide Sputtering Target WO3

      Backordered
      From $ 284.95
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    • MSE PRO Tungsten Selenide Sputtering Target WSe<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tungsten Selenide Sputtering Target WSe2

      Backordered
      $ 1,128.95
    • MSE PRO Tungsten Silicide Sputtering Target WSi<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tungsten Silicide Sputtering Target WSi2

      Backordered
    • MSE PRO Tungsten Telluride Sputtering Target WTe<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tungsten Telluride Sputtering Target WTe2

      Backordered
    • MSE PRO Tungsten Titanium Sputtering Target WTi, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tungsten Titanium Sputtering Target WTi

      Out of stock
      From $ 94.95
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    • MSE PRO Vanadium Boride Sputtering Target VB, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Vanadium Boride Sputtering Target VB

      Backordered
      From $ 1,047.95
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    • MSE PRO Vanadium Carbide Sputtering Target VC, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Vanadium Carbide Sputtering Target VC

      Backordered
    • MSE PRO Vanadium Oxide Sputtering Targets V<sub>2</sub>O<sub>5</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Vanadium Oxide Sputtering Targets V2O5

      Backordered
      From $ 365.95
      Select options
    • MSE PRO Vanadium Silicide Sputtering Target VSi<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Vanadium Silicide Sputtering Target VSi2

      Backordered
    • MSE PRO Vanadium Sputtering Target V, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Vanadium Sputtering Target V

      Backordered
      From $ 98.95
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    • MSE PRO Ytterbium Fluoride Sputtering Target YbF<sub>3</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Ytterbium Fluoride Sputtering Target YbF3

      Backordered
      From $ 633.95
      Select options
    • MSE PRO Ytterbium Oxide Sputtering Target Yb<sub>2</sub>O<sub>3</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Ytterbium Oxide Sputtering Target Yb2O3

      Backordered
    • MSE PRO Ytterbium Sputtering Target Yb, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Ytterbium Sputtering Target Yb

      Backordered
    • MSE PRO Yttrium Fluoride Sputtering Target YF<sub>3</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Yttrium Fluoride Sputtering Target YF3

      Backordered
    • MSE PRO Yttrium Oxide Sputtering Target Y<sub>2</sub>O<sub>3</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Yttrium Oxide Sputtering Target Y2O3

      Backordered
    • MSE PRO Zinc Aluminum Sputtering Target ZnAl, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Zinc Aluminum Sputtering Target ZnAl

      Backordered
    • MSE PRO Zinc Magnesium Sputtering Target ZnMg, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Zinc Magnesium Sputtering Target ZnMg

      Backordered
    • MSE PRO Zinc Oxide doped with Gallium Oxide Sputtering Targets ZnO/Ga<sub>2</sub>O<sub>3</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Zinc Oxide doped with Gallium Oxide Sputtering Targets ZnO/Ga2O3

      Backordered
      $ 767.95
    • MSE PRO Zinc Oxide doped with Magnesium Sputtering Target ZnMgO, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Zinc Oxide doped with Magnesium Sputtering Target ZnMgO

      Backordered
    • MSE PRO Zinc Oxide Sputtering Target ZnO, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Zinc Oxide Sputtering Target ZnO

      Ready to Ship
      From $ 325.95
      $ 365.95 From $ 325.95
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    • MSE PRO Zinc Selenide Sputtering Targets ZnSe, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Zinc Selenide Sputtering Targets ZnSe

      Backordered
    • MSE PRO Zinc Sputtering Target Zn, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Zinc Sputtering Target Zn

      Ready to Ship
      From $ 85.95
      $ 97.95 From $ 85.95
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