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Sputtering Targets

MSE Supplies is the industry-leading source for sputtering targets. Our vast selection includes high-purity metal, high-purity alloy and ceramic targets. We also produce sputtering targets customized by chemistry, geometry and size to meet your specifications. We also provide SPS equipment for sputtering target manufacturing. Shop online by chemical composition here.

    Antimonide Sputtering Targets

    Antimonide Sputtering Targets (271)

    Arsenide Sputtering Targets

    Arsenide Sputtering Targets (0)

    Boride Ceramic Sputtering Targets

    Boride Ceramic Sputtering Targets (12)

    Carbide Ceramic Sputtering Targets

    Carbide Ceramic Sputtering Targets (11)

    Fluoride Ceramic Sputtering Targets

    Fluoride Ceramic Sputtering Targets (20)

    High Purity Alloy Sputtering Targets

    High Purity Alloy Sputtering Targets (16)

    High Purity Metal Sputtering Targets

    High Purity Metal Sputtering Targets (112)

    MSE PRO Niobium (Nb) Powder, Sputtering Target and Evaporation Material

    MSE PRO Niobium (Nb) Powder, Sputtering Target and Evaporation Material (6)

    Nitride Ceramic Sputtering Targets

    Nitride Ceramic Sputtering Targets (9)

    Oxide Ceramic Sputtering Targets

    Oxide Ceramic Sputtering Targets (43)

    Selenide Ceramic Sputtering Targets

    Selenide Ceramic Sputtering Targets (271)

    Silicide Ceramic Sputtering Targets

    Silicide Ceramic Sputtering Targets (13)

    Sulfide Ceramic Sputtering Targets

    Sulfide Ceramic Sputtering Targets (11)

    Telluride Sputtering Targets

    Telluride Sputtering Targets (11)

    271 Products

    • MSE PRO Silicon Sputtering Target Si (undoped), Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silicon Sputtering Target Si (undoped)

      Backordered
      From $ 120.95
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    • MSE PRO Silicon Sputtering Target Si N-Type, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silicon Sputtering Target Si N-Type

      Backordered
      From $ 197.95
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    • MSE PRO Silicon Sputtering Target Si P-Type, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silicon Sputtering Target Si P-Type

      Backordered
      From $ 197.95
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    • MSE PRO Silver Copper Sputtering Targets AgCu, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silver Copper Sputtering Targets AgCu

      Backordered
    • MSE PRO Silver Sputtering Target Ag, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silver Sputtering Target Ag

      Backordered
    • MSE PRO Silver Tin Sputtering Target AgSn, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silver Tin Sputtering Target AgSn

      Backordered
    • MSE PRO Sodium Fluoride Sputtering Target NaF, 99.99%, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Sodium Fluoride Sputtering Target NaF, 99.99%

      Backordered
      From $ 276.95
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    • MSE PRO Solid Electrolyte, Lithium Phosphate (Li<sub>3</sub>PO<sub>4</sub>) LiPON Sputtering Targets, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Solid Electrolyte, Lithium Phosphate (Li3PO4) LiPON Sputtering Targets

      Backordered
      From $ 765.95
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    • MSE PRO Solid Electrolyte, Nb-doped LLZO Sputtering Target for LLZO Thin Films, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Solid Electrolyte, Nb-doped LLZO Sputtering Target for LLZO Thin Films

      Ready to Ship
      From $ 1,523.95
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    • MSE PRO Solid Electrolyte, Ta-doped LLZO Sputtering Target for LLZO Thin Films, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Solid Electrolyte, Ta-doped LLZO Sputtering Target for LLZO Thin Films

      Backordered
      From $ 1,050.95
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    • MSE PRO Strontium Fluoride Sputtering Target SrF<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Strontium Fluoride Sputtering Target SrF2

      Backordered
    • MSE PRO Strontium Titanate Sputtering Target SrTiO<sub>3</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Strontium Titanate Sputtering Target SrTiO3

      Backordered
      From $ 642.95
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    • MSE PRO Tantalum Aluminum Sputtering Target TaAl, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Aluminum Sputtering Target TaAl

      Backordered
    • MSE PRO Tantalum Boride Sputtering Target TaB, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Boride Sputtering Target TaB

      Backordered
    • MSE PRO Tantalum Carbide Sputtering Target TaC, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Carbide Sputtering Target TaC

      Backordered
    • MSE PRO Tantalum Nitride Sputtering Target TaN, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Nitride Sputtering Target TaN

      Ready to Ship
      From $ 688.95
      $ 772.95 From $ 688.95
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    • MSE PRO Tantalum Pentoxide Sputtering Target Ta<sub>2</sub>O<sub>5</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Pentoxide Sputtering Target Ta2O5

      Backordered
      From $ 446.95
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    • MSE PRO Tantalum Selenide Sputtering Target TaSe<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Selenide Sputtering Target TaSe2

      Backordered
    • MSE PRO Tantalum Silicide Sputtering Target TaSi<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Silicide Sputtering Target TaSi2

      Backordered
    • MSE PRO Tantalum Sputtering Target Ta, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Sputtering Target Ta

      Backordered
      From $ 216.95
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    • MSE PRO Tantalum Sulfide Sputtering Target TaS<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Sulfide Sputtering Target TaS2

      Backordered
    • MSE PRO Tantalum Telluride Sputtering Target TaTe<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Tantalum Telluride Sputtering Target TaTe2

      Backordered
    • MSE PRO Teflon (PTFE) Sputtering Target, 99.9% Purity, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Teflon (PTFE) Sputtering Target, 99.9% Purity

      Ready to Ship
      From $ 186.95
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    • MSE PRO Terbium Iron Alloy Sputtering Target TbFe, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Terbium Iron Alloy Sputtering Target TbFe

      Backordered