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Sputtering Targets

MSE Supplies is the industry-leading source for sputtering targets. Our vast selection includes high-purity metal, high-purity alloy and ceramic targets. We also produce sputtering targets customized by chemistry, geometry and size to meet your specifications. We also provide SPS equipment for sputtering target manufacturing. Shop online by chemical composition here.

    Antimonide Sputtering Targets

    Antimonide Sputtering Targets (271)

    Arsenide Sputtering Targets

    Arsenide Sputtering Targets (0)

    Boride Ceramic Sputtering Targets

    Boride Ceramic Sputtering Targets (12)

    Carbide Ceramic Sputtering Targets

    Carbide Ceramic Sputtering Targets (11)

    Fluoride Ceramic Sputtering Targets

    Fluoride Ceramic Sputtering Targets (20)

    High Purity Alloy Sputtering Targets

    High Purity Alloy Sputtering Targets (16)

    High Purity Metal Sputtering Targets

    High Purity Metal Sputtering Targets (112)

    MSE PRO Niobium (Nb) Powder, Sputtering Target and Evaporation Material

    MSE PRO Niobium (Nb) Powder, Sputtering Target and Evaporation Material (6)

    Nitride Ceramic Sputtering Targets

    Nitride Ceramic Sputtering Targets (9)

    Oxide Ceramic Sputtering Targets

    Oxide Ceramic Sputtering Targets (43)

    Selenide Ceramic Sputtering Targets

    Selenide Ceramic Sputtering Targets (271)

    Silicide Ceramic Sputtering Targets

    Silicide Ceramic Sputtering Targets (13)

    Sulfide Ceramic Sputtering Targets

    Sulfide Ceramic Sputtering Targets (11)

    Telluride Sputtering Targets

    Telluride Sputtering Targets (11)

    271 Products

    • MSE PRO Niobium Carbide Sputtering Target NbC, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Niobium Carbide Sputtering Target NbC

      Backordered
    • MSE PRO Niobium Nitride Sputtering Target NbN, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Niobium Nitride Sputtering Target NbN

      Backordered
    • MSE PRO Niobium Oxide Sputtering Target Nb<sub>2</sub>O<sub>5</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Niobium Oxide Sputtering Target Nb2O5

      Backordered
      From $ 161.95
      Select options
    • MSE PRO Niobium Selenide Sputtering Target NbSe<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Niobium Selenide Sputtering Target NbSe2

      Backordered
    • MSE PRO Niobium Silicide Sputtering Target Nb<sub>5</sub>Si<sub>3</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Niobium Silicide Sputtering Target Nb5Si3

      Backordered
    • MSE PRO Niobium Sputtering Target Nb, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Niobium Sputtering Target Nb

      Backordered
      From $ 179.95
      Select options
    • MSE PRO Niobium Sulfide Sputtering Target NbS<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Niobium Sulfide Sputtering Target NbS2

      Backordered
    • MSE PRO Niobium Telluride Sputtering Target NbTe<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Niobium Telluride Sputtering Target NbTe2

      Backordered
    • MSE PRO Palladium Sputtering Target Pd, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Palladium Sputtering Target Pd

      Backordered
    • MSE PRO Platinum Sputtering Target Pt, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Platinum Sputtering Target Pt

      Backordered
    • MSE PRO Potassium Fluoride Sputtering Target KF, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Potassium Fluoride Sputtering Target KF

      Backordered
    • MSE PRO Praseodymium Fluoride Sputtering Target PrF<sub>3</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Praseodymium Fluoride Sputtering Target PrF3

      Backordered
    • MSE PRO Praseodymium Oxide Sputtering Target Pr<sub>6</sub>O<sub>11</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Praseodymium Oxide Sputtering Target Pr6O11

      Backordered
    • MSE PRO Praseodymium Sputtering Target Pr, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Praseodymium Sputtering Target Pr

      Backordered
    • MSE PRO Rhenium Sputtering Target Re, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Rhenium Sputtering Target Re

      Backordered
    • MSE PRO Rhodium Sputtering Target (Rh), Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Rhodium Sputtering Target (Rh)

      Backordered
    • MSE PRO Ruthenium Sputtering Target Ru, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Ruthenium Sputtering Target Ru

      Backordered
    • MSE PRO Samarium Fluoride Sputtering Target SmF<sub>3</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Samarium Fluoride Sputtering Target SmF3

      Out of stock
    • MSE PRO Samarium Oxide Sputtering Target Sm<sub>2</sub>O<sub>3</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Samarium Oxide Sputtering Target Sm2O3

      Out of stock
    • MSE PRO Selenide Ceramic Sputtering Targets, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Selenide Ceramic Sputtering Targets

      Backordered
    • MSE PRO Selenium Sputtering Target Se, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Selenium Sputtering Target Se

      Backordered
      From $ 339.95
      Select options
    • MSE PRO Silicon Carbide Sputtering Target SiC, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silicon Carbide Sputtering Target SiC

      Backordered
      From $ 499.95
      Select options
    • MSE PRO Silicon Dioxide Sputtering Target SiO<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silicon Dioxide Sputtering Target SiO2

      Ready to Ship
      From $ 94.95
      Select options
    • MSE PRO Silicon Nitride Sputtering Target Si<sub>3</sub>N<sub>4</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Silicon Nitride Sputtering Target Si3N4

      Backordered
      From $ 259.95
      Select options