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MSE PRO Ruthenium Sputtering Target Ru - MSE Supplies LLC

MSE PRO Ruthenium Sputtering Target Ru

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Specifications for Ruthenium Sputtering Target

Material Type Ruthenium
Symbol Ru
Atomic Weight 101.07
Atomic Number 44
Color/Appearance Silvery White Metallic
Thermal Conductivity 120 W/m.K
Melting Point (°C) 2,310
Coefficient of Thermal Expansion 6.4 x 10-6/K
Theoretical Density (g/cc) 12.3
Z Ratio 0.182
Sputter DC
Max Power Density
(Watts/Square Inch)
100*
Type of Bond Indium, Elastomer