MSE PRO 6 inch UV Grade Aluminum Nitride (1µm) Template on Sapphire <0001>
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$ 2,495.95
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MSE PRO 6 inch UV Grade Aluminum Nitride (1µm) Template on Sapphire <0001>
SDS_sheet for Aluminum Nitride (AlN) Substrates
Introduction
UV-AlN templates are grown using a modified plasma vapor
deposition nanocolumnar process (PVDNC) that produces a high quality AlN buffer for subsequent AlN or AlGaN device epitaxy.
Typically utilized in UV- LEDs, the templates are also suitable for use in electronic devices, and for basic research.
Specification
| Parameter | Specification |
|---|---|
| Size | 150 mm diameter |
| AlN Thickness | 1 µm |
| Substrate | Sapphire, c-plane ⟨0001⟩, SSP |
| Front Surface | Epi-ready, RMS ~ 1 nm |
| XRD Linewidth (002) | < 100 arcsec |
| XRD Linewidth (102) | < 300 arcsec |
Please contact us for customization.