MSE PRO 6 inch PVDNC Aluminum Nitride (1µm) Template on Sapphire <0001>
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MSE PRO 6 inch PVDNC Aluminum Nitride (1µm) Template on Sapphire <0001>
SDS_sheet for Aluminum Nitride (AlN) Substrates
Introduction
PVDNC AlN templates have a nano-columnar structure
leading to excellent crystalline quality. Possessing ultra-high purity, AlN templates grown by PVDNC provide a high quality AlN buffer for subsequent GaN device epitaxy on c-plane Sapphire or Silicon.
Typically utilized in blue LEDs, the templates are also suitable for use in electronic devices, for epitaxial GaN growth, and for basic research.
Specification
| Parameter | Specification |
|---|---|
| Size | 150 mm diameter |
| AlN Thickness | 1 µm |
| Substrate | Sapphire, c-plane ⟨0001⟩, SSP |
| Front Surface | Epi-ready, RMS ~ 1 nm |
| XRD Linewidth (002) | 90 – 140 arcsec |
| XRD Linewidth (102) | ~2000 – 25000 arcsec |
Atomic Force Microscopy (AFM) Images
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