MSE PRO 100 mm P Type (B-doped) Prime Grade Silicon Wafer <100>, SSP, 10-20 ohm-cm
100 mm P Type (B-doped) SEMI Standard Prime Grade Silicon Wafer <100>, 10-20 ohm-cm, Single Side Polished, 4 inch Si Wafer
Product SKU#: WA0801
Product Specifications
- Material: Single Crystal Silicon Wafer
- Growth Method: MCZ
- Orientation: <100>
- Diameter: 100 mm +/- 0.5 mm
- Thickness: 525 um +/- 20 um (SSP)
- Primary Flat Orientation: <110> +/-1 deg
- Primary Flat Length: 32.5 +/- 2.5 mm
- Secondary Flat Orientation: 90 deg from primary flat
- Secondary Flat Length: 18.0 +/- 2.0 mm
- Type/ Dopant: P/ Boron
- Thermal Expansion Coefficient: 2.6·10-6°C -1
- Electrical Resistivity: 10-20 ohm-cm
- RRV: 8% (6mm)
- Oxygen Content: 1.6 x 10^18 atoms/cm3
- Carbon Content: 0.5 ppm
- GBIR/ TTV: 5 um
- WARP: 30 um
- BOW: 30 um
- Front Surface: CMP Polished, Ra < 0.5 nm (single side polished, SSP)
- Package: Packaged in a class 100 clean room environment, in cassettes of 25 pcs under vacuum or in single wafer containers.
Please contact us if you have bulk orders or need customization.
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