Kofloc Standard Mass Flow Controller Model 3660 Series
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Kofloc Standard Mass Flow Controller Model 3660 Series
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Applicable gas:
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N₂, Air, H₂, He, Ar, O₂, CO₂ etc.
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Flow range:
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10SCCM～100SLM
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Accuracy:
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±1～1.5%F.S.
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- Capable of wide flow range from F.S.10SCCM to F.S.100SLM by N₂ conversion.
- CE
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Specifications:
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MODEL |
3660 |
3665 |
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Sensor type |
Thermal sensor |
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Valve type |
Proportional solenoid valve (normally closed) |
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Applicable gas |
N2, Air, H2, He, Ar, O2, CO2, etc |
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Full-scale flow rate (N₂ equivalent) |
10SCCM to 20SLM |
30 to 100SLM |
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Control range |
2 to 100%F.S. |
5 to 100%F.S. |
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Response |
Within 2sec. (within ±2% F.S.) |
Within 3sec. (within ±2% F.S.) |
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Accuracy |
±1%F.S. (25°C) |
±1.5%F.S. (25°C) |
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Temperature coefficient |
±0.1%F.S./°C (15 to 35°C) |
±0.2%F.S./°C (15 to 35°C) |
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Repeatability |
±0.5%F.S |
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Operating differential pressure |
F.S. ≤ 5SLM 50 to 300kPa, F.S. > 5SLM 100 to 300kPa |
F.S. ≤ 50SLM 150 to 300kPa, F.S. > 50SLM 200 to 300kPa |
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Max. inlet pressure |
500kPa(G) |
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Proof pressure |
1MPa(G) |
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He Leak rate |
≤ 1 x 10-8Pa·m³/s |
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Allowable ambient temperature |
5 to 45°C |
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Allowable storage temperature |
-10 to 60°C |
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Allowable ambient humidity |
10%RH to 90%RH (no dew condensation) |
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Materials of parts in contact with gases |
SUS316L, SUS316, Magnetic stainless steel, FKM (option: NBR or CR) |
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Electrical connection |
D-sub 9 pins, KFC standard (compliant with the SEMI standard) |
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Flow rate setting signal |
0 to 5VDC (Input impedance: 1MΩ or more) |
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Flow rate output signal |
0 to 5VDC (Load resistance: 250kΩ or more) |
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Power supply |
+15VDC (±5%) 100mA, -15VDC (±5%) 250mA |
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Fittings |
Standard: 1/4SWL type, Option: 1/8SWL type, 1/4VCR type, Rc1/4 |
Standard: 3/8SWL type, Option: 1/2SWL type, 1/2VCR type, Rc3/8 |
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Weight |
Approx. 1,000g |
Approx. 1,500g |