Kofloc Digital Mass Flow Meter with Display MODEL 8700 SERIES

MODEL

8700MC / MM

8750MC / MM

Sensor type

Thermal sensor

Valve type

Proportional solenoid valve (normally closed)

Applicable gas

N₂, Air, H₂, He, Ar, O₂, CO₂, etc.

Full-scale flow rate (N₂ equivalent)

10SCCM to 20SLM

30 to 100SLM

Control range

2 to 100%F.S.

5 to 100%F.S.

Response

Within 2sec. (within ±2% F.S.)

Within 3sec. (within ±2% F.S.)

Accuracy

±1%F.S. (25°C)

±1.5%F.S. (25°C)

Temperature coefficient

±0.1% F.S./°C (15 to 35°C)

±0.2%F.S./°C (15 to 35°C)

Repeatability

±0.5%F.S.

Operating differential pressure

F.S. ≤ 5SLM 50 to 300kPa
   F.S. > 5SLM 100 to 300kPa

F.S. ≤ 50SLM 150 to 300kPa
F.S. > 50SLM 200 to 300kPa

Max. inlet pressure

500kPa(G)

Proof pressure

1MPa(G)

He Leak rate

≤ 1 x 10⁻¹⁰Pa⋅m³/s

Allowable ambient temperature

5 to 45°C

Allowable storage temperature

-10 to 60°C

Allowable ambient humidity

10%RH to 90% RH (no dew condensation)

Materials of parts in contact with gases

SUS316, SUS316L, Magnetic stainless steel (MFC only), FKM (option: NBR or CR)

Electrical connection

D-sub half pitch 20 pins, Hirose DX10M-20S

Flow rate setting signal

0 to 5VDC (Input impedance: 100kΩ or more) / 4 to 20mA (Input impedance: Approx. 250Ω)

Flow rate output signal

0 to 5VDC (Load resistance: 250kΩ or more) / 4 to 20mA (Load resistance: 300Ω or less)

Digital communication

RS485

Display

4-digit 7-segment LED

Power supply

24VDC (±10%), 300mA or less