Kofloc Digital Mass Flow Controller with Display MODEL 8700 SERIES
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Kofloc Digital Mass Flow Controller with Display MODEL 8700 SERIES
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Applicable gas:
- N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
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Flow range:
- 10SCCM~100SLM
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Accuracy:
- ±1~1.5%F.S.
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Capable of wide flow range (from F.S. 10SCCM to F.S. 100SLM in N2 equivalent)
- Various functions are available with built-in display Instantaneous / integrated flow rate display alarm setting
- RS485 communication function 0 to 5VDC analog input / output (changeable to 4 to 20mA)
Specifications:
|
MODEL |
8700MC/MM |
8750MC/MM |
|
Sensor type |
Thermal sensor |
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Valve type |
Proportional solenoid valve (normally closed) |
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Applicable gas |
N2, Air, H2, He, Ar, O2, CO2, etc. |
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Full-scale flow rate (N2 equivalent) |
10SCCM to 20SLM |
30 to 100SLM |
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Control range |
2 to 100%F.S. |
5 to 100%F.S. |
|
Response |
Within 2sec. (within ±2% F.S.) |
Within 3sec. (within ±2% F.S.) |
|
Accuracy |
±1%F.S. (25°C) |
±1.5%F.S. (25°C) |
|
Temperature coefficient |
±0.1%F.S./°C (15 to 35°C) |
±0.2%F.S./°C (15 to 35°C) |
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Repeatability |
±0.5%F.S. |
|
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Operating differential pressure |
F.S. ≤ 5SLM 50 to 300kPa |
F.S. ≤ 50SLM 150 to 300kPa |
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Max. inlet pressure |
500kPa(G) |
|
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Proof pressure |
1MPa(G) |
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He Leak rate |
≤ 1 × 10-8 Pa-m³/s |
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Allowable ambient temperature |
5 to 45°C |
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Allowable storage temperature |
-10 to 60°C |
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Allowable ambient humidity |
10%RH to 90%RH (no dew condensation) |
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Materials of parts in contact with gases |
SUS316, SUS316L, Magnetic stainless steel (MFC only), FKM (option: NBR or CR) |
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Electrical connection |
D-sub half pitch 20 pins, Hirose DX10M-20S |
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Flow rate setting signal |
0 to 5VDC (Input impedance: 100kΩ or more) / 4 to 20mA (Input impedance: Approx. 250Ω) |
|
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Flow rate output signal |
0 to 5VDC (Load resistance: 250kΩ or more) / 4 to 20mA (Load resistance: 300Ω or less) |
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Digital communication |
RS485 |
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Display |
4-digit 7-segment LED |
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Power supply |
24VDC (±10%), 300mA or less |
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Fittings |
Standard: Rc1/4 |
Standard: Rc3/8 |
|
Weight |
Approx. 1,200g |
Approx. 1,500g |