MSE PRO UV 2 inch 1um Aluminum Nitride Template on Sapphire, Single Side Polished

SKU: WA0067041
Regular price $ 529.95

Still have questions? Ask our experts!

MSE PRO™ UV 2-inch 1um Aluminum Nitride Template on Sapphire, Single Side Polished

  • The surface of UV AlN is made of nanocolumns of AlN.
  • These nanocolumns allow the epi-grower to employ a wider range of growth temperature and precursor supersaturation for subsequent epilayers.
  • The RMS of these surfaces is around 1 nm.

Technical Features:

Sapphire (SSP or DSP)
Wafer Diameter 2”, 100 mm, 150 mm
Orientation c-axis (001)
AlN
Thickness (standard) 400 nm
Custom thickness upon request
Crystal Quality (FWHM)
[002] XRD Linewidth < 100 arcsec
[102] XRD Linewidth < 300 arcsec
Edge Exclusion
2” 3 mm
100mm, 150mm 5 mm
Surface Morphology (Al-Face, Epi-ready)
AFM (Rz ) 1 nm