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Sputtering Targets

MSE Supplies is the industry-leading source for sputtering targets. Our vast selection includes high-purity metal, high-purity alloy and ceramic targets. We also produce sputtering targets customized by chemistry, geometry and size to meet your specifications. We also provide SPS equipment for sputtering target manufacturing. Shop online by chemical composition here.

    Antimonide Sputtering Targets

    Antimonide Sputtering Targets (278)

    Arsenide Sputtering Targets

    Arsenide Sputtering Targets (0)

    Boride Ceramic Sputtering Targets

    Boride Ceramic Sputtering Targets (12)

    Carbide Ceramic Sputtering Targets

    Carbide Ceramic Sputtering Targets (11)

    Fluoride Ceramic Sputtering Targets

    Fluoride Ceramic Sputtering Targets (20)

    High Purity Alloy Sputtering Targets

    High Purity Alloy Sputtering Targets (16)

    High Purity Metal Sputtering Targets

    High Purity Metal Sputtering Targets (119)

    MSE PRO Niobium (Nb) Powder, Sputtering Target and Evaporation Material

    MSE PRO Niobium (Nb) Powder, Sputtering Target and Evaporation Material (6)

    Nitride Ceramic Sputtering Targets

    Nitride Ceramic Sputtering Targets (9)

    Oxide Ceramic Sputtering Targets

    Oxide Ceramic Sputtering Targets (43)

    Selenide Ceramic Sputtering Targets

    Selenide Ceramic Sputtering Targets (278)

    Silicide Ceramic Sputtering Targets

    Silicide Ceramic Sputtering Targets (13)

    Sulfide Ceramic Sputtering Targets

    Sulfide Ceramic Sputtering Targets (11)

    Telluride Sputtering Targets

    Telluride Sputtering Targets (11)

    278 Products

    • MSE PRO Cerium Sputtering Target Ce, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Cerium Sputtering Target Ce

      Backordered
    • MSE PRO Chromium Boride Sputtering Target Cr<sub>5</sub>B<sub>3</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Chromium Boride Sputtering Target Cr5B3

      Backordered
    • MSE PRO Chromium Carbide Sputtering Target Cr<sub>3</sub>C<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Chromium Carbide Sputtering Target Cr3C2

      Backordered
    • MSE PRO Chromium Diboride Sputtering Target CrB<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Chromium Diboride Sputtering Target CrB2

      Backordered
    • MSE PRO Chromium Oxide Sputtering Target Cr<sub>2</sub>O<sub>3</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Chromium Oxide Sputtering Target Cr2O3

      Backordered
      From $ 290.95
      Select options
    • MSE PRO Chromium Silicide Sputtering Target CrSi<sub>2</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Chromium Silicide Sputtering Target CrSi2

      Backordered
    • MSE PRO Chromium Silicon Monoxide Sputtering Target CrSiO, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Chromium Silicon Monoxide Sputtering Target CrSiO

      Backordered
    • MSE PRO Chromium Silicon Sputtering Target CrSi, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Chromium Silicon Sputtering Target CrSi

      Backordered
    • MSE PRO Chromium Sputtering Target Cr, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Chromium Sputtering Target Cr

      Ready to Ship
      From $ 97.95
      $ 110.95 From $ 97.95
      Select options
    • MSE PRO Cobalt Chromium Sputtering Target CoCr, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Cobalt Chromium Sputtering Target CoCr

      Backordered
    • MSE PRO Cobalt Iron Boron Sputtering Target CoFeB (Co/Fe/B 60/20/20 AT%), Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Cobalt Iron Boron Sputtering Target CoFeB (Co/Fe/B 60/20/20 AT%)

      Backordered
      From $ 875.95
      Select options
    • MSE PRO Cobalt Nickel Sputtering Target Co/Ni, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Cobalt Nickel Sputtering Target Co/Ni

      Backordered
    • MSE PRO Cobalt Silicide Sputtering Target Co<sub>3</sub>Si, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Cobalt Silicide Sputtering Target Co3Si

      Backordered
    • MSE PRO Cobalt Sputtering Target Co, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Cobalt Sputtering Target Co

      Ready to Ship
      From $ 109.95
      $ 123.95 From $ 109.95
      Select options
    • MSE PRO Copper Cobalt Sputtering Target CuCo, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Copper Cobalt Sputtering Target CuCo

      Backordered
    • MSE PRO Copper Gallium Sputtering Target CuGa, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Copper Gallium Sputtering Target CuGa

      Backordered
    • MSE PRO Copper Indium Gallium Selenide Sputtering Target CIGS, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Copper Indium Gallium Selenide Sputtering Target CIGS

      Backordered
    • MSE PRO Copper Nickel Sputtering Target CuNi, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Copper Nickel Sputtering Target CuNi

      Backordered
    • MSE PRO Copper Oxide Sputtering Target CuO, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Copper Oxide Sputtering Target CuO

      Backordered
      From $ 358.95
      Select options
    • MSE PRO Copper Sputtering Target Cu, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Copper Sputtering Target Cu

      Ready to Ship
      From $ 78.95
      Select options
    • MSE PRO Copper Zirconium Sputtering Target CuZr, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Copper Zirconium Sputtering Target CuZr

      Out of stock
    • MSE PRO Diiron Boride Sputtering Target Fe<sub>2</sub>B, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Diiron Boride Sputtering Target Fe2B

      Backordered
    • MSE PRO Elastomer Bonding on Cu Backing Plate for Sputtering Targets, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Elastomer Bonding on Cu Backing Plate for Sputtering Targets

      Out of stock
      From $ 214.95
      Select options
    • MSE PRO Erbium Fluoride Sputtering Target ErF<sub>3</sub>, Sputtering Targets, MSE Supplies LLC, MSE Supplies
      MSE Supplies LLC

      MSE PRO Erbium Fluoride Sputtering Target ErF3

      Backordered