Description for Titanium Sputtering Target

Titanium is a material that is widely used in watches, biomedical implants, drill bits, laptops, etc. In its pure metal form, Titanium is lustrous and silvery-white in appearance. Titanium has a melting point of 1660°C, a density of 4.5 g/cc, and a vapor pressure of 10^-4Torr at 1,453°C. It is a sturdy material and can be easily fabricated when heated. Its strong, lightweight characteristics and excellent corrosion resistance make it ideal for ocean liner hulls, aircraft engines, and designer jewelry. Titanium is a biocompatible material and therefore it has been used in surgical tools and medical implants. Titanium is generally evaporated in vacuum and deposited as coatings for the purposes of wear and decorative, semiconductor, and optical applications.

Customized Titanium sputtering targets are available upon request. We can custom make the Ti sputtering targets to meet customer's specific requirements and drawings.

Specifications for Titanium Sputtering Target

Name: Titanium
Symbol: Ti
Atomic Number: 22
Atomic Mass: 47.867 amu
Melting Point: 1660.0 °C (1933.15 K, 3020.0 °F)
Boiling Point: 3287.0 °C (3560.15 K, 5948.6 °F)

Number of Protons/Electrons: 22 Number of Neutrons: 26
Classification: Transition Metal
Crystal Structure: Hexagonal
Density @ 293 K: 4.54 g/cm³

Color: silverish

Titanium Sputtering Targets ( Ti target )

Material: High purity (99.5%, 99.995%), ASTM grade 1, ASTM grade 2, TiAl₆V₄
Standard: ASTM B 337/B338, ASTM B385-91,ASTM381, ISO 5832/2,JIS H4650,Din 17851
Shape: Discs (Diameter <350mm), Thickness>1mm Rectangle (Length 1800mm, Width 400mm Thickness>1mm Tube ( Rotory target, OD: 20mm~160mm, Thickness: 2-20mm, Length: custom-made OD>160, Thickness >8mm, length <200)
Application: Deposited film nitride as Decorate thin film, Deposited film oxidized to TiO₂as beam splitter or insulator

Titanium Pellet (Evaporation Material)

Material: High purity (99.99%, 99.995%), ASTM grade 1, ASTM grade 2, TiAl₆V₄
Standard: ASTM B 337/B338, ASTM B385-91,ASTM381, ISO 5832/2,JIS H4650,Din 17851
Shape: Pellet, Slug
Dimension: 3X3mm, 6X6mm, 3X8mm

Typical analysis for 99.995% Purity, Analysis by GDMS
Element	ppm	Element	ppm
Li	<0.01	Nb	<0.2
Be	<0.005	Mo	<0.5
B	<0.01	Ru	<0.01
Na	<0.01	Rh	<0.05
Mg	0.05	Pd	<0.01
Al	0.01	Ag	<0.05
Si	0.21	Cd	<0.05
P	<0.01	In	<0.05
S	0.02	Sn	<0.05
K	<0.01	Sb	<0.05
Ca	<0.2	Te	<0.05
Sc	<0.05	Ba	<0.005
V	0.01	Ce	<0.005
Cr	0.06	Hf	<0.01
Mn	0.06	Ta	< 2
Fe	1.5	W	<0.01
Co	<0.01	Re	<0.01
Ni	0.16	Os	<0.01
Cu	0.2	Ir	<0.01
Zn	<0.05	Pt	<0.05
Ga	<0.05	Au	<0.05
Ge	<0.05	Hg	<0.1
As	0.02	Pb	<0.01
Se	<0.05	Bi	<0.01
Zr	<0.05	Th	<0.0001

MSE PRO Titanium (Ti) Sputtering Target

MSE PRO Titanium Sputtering Target Ti

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