MSE PRO Vacuum Magnetron Sputter Coater

Introduction

The MSE PRO Vacuum Magnetron Sputter Coater is a compact and efficient thin-film deposition system based on physical vapor deposition (PVD) technology. It utilizes magnetron sputtering to deposit uniform, high-purity coatings by ejecting target material particles in a controlled vacuum environment. Designed for laboratory use, including SEM sample preparation, it offers precise control, reliable performance, and user-friendly operation, making it suitable for both beginners and advanced users.

Key Features

Advanced PVD Technology
Utilizes magnetron sputtering for high-quality, uniform thin-film deposition.
Real-Time Monitoring
Equipped with vacuum and sputtering current meters for process visibility.
Precise Process Control
Adjustable sputtering current and vacuum gas valve for optimal coating conditions.
Uniform & High-Purity Coatings
Large-capacity chamber and optimized target design ensure consistent film quality.
Durable Sealing Design
Reinforced glass bell jar with specialized sealing ring prevents damage during long-term use.
High-Quality Electrode System
Ceramic-sealed high-voltage components for improved durability and reliability.
Efficient Cooling System
Peltier-cooled sputter head enhances coating performance; optional water cooling available.
Compact & Space-Saving Design
Ideal for laboratories with limited space.
User-Friendly Operation
Simple controls make it suitable for beginners and research environments.
Flexible Material Compatibility
Suitable for sputtering metals such as Au, Ag, Cu, and more.

Specifications

Model	MSE PRO Vacuum Magnetron Sputter Coater
Target Size	Ø50 mm
Target Thickness	0.1 – 0.5 mm
Vacuum Chamber Size	Ø160 × 120 mm
Vacuum Degree	≤ 4 × 10⁻² mbar
Maximum Current	50 mA (optional 100 mA)
Limit Voltage	1600 V DC
Time Setting Range	Up to 9999 s
Micro Vacuum Valve	Ø3 mm hose connection
Mechanical Pump	2 L/s
Suitable Target Materials	Au, Ag, Cu, and other metals
Cooling System	Peltier cooling (optional water cooling)
Power Supply	AC 110V / 60 Hz
Equipment Dimensions	360 × 300 × 380 mm
Gross Weight	50 kg
Net Weight	15 kg
Operating Conditions	≤1000 m altitude; 25℃±15℃; 55%RH±10%RH
Gas Requirement	Argon ≥99.99% purity
Water Requirement	Deionized or pure water (for cooling system)
Work Table Requirement	≥600 × 600 × 700 mm, ≥50 kg load capacity

MSE offers a range of sputter coaters. Please contact us for more information.

InfinityPV Research Laboratory Coaters

MSE PRO Vacuum Magnetron Sputter Coater

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