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Tantalum Nitride Sputtering Target TaN

Tantalum Nitride Sputtering Target TaN

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Specifications

Material Type Tantalum Nitride
Symbol TaN
Color/Appearance Black, Crystalline Solid
Melting Point (°C) 3,360
Theoretical Density (g/cc) 16.3
Z Ratio **1.00
Sputter RF, RF-R
Max Power Density
(Watts/Square Inch)
20*
Type of Bond Indium, Elastomer
Comments Evaporate Ta in 10-3 Torr N2.

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