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SiO2 Silica Quartz Single Crystal Wafers and Substrates

SiO2 Silica Quartz Single Crystal Wafers and Substrates

  • $ 1895


Single crystal quartz wafers are ideal for use as substrates for thin film deposition and are also suitable for many optical applications.  Quartz single crystal wafers and substrates are also used as microwave filters in wireless communication. 

MSE Supplies offers both standard and custom-made quartz wafers and substrates.  

Typical Physical Properties

Purity   Wt %

SAW grade:  > 99.9     Optical grade: 99.99

Crystal Structure

Hex.     a= 4.914 Å c = 5.405 Å

Growth Method

Hydrothermal method

Hardness

7.0  Moh’s

Density

2.684   g/cm3

Melt Point

1610          ( phase transition point: 573.1)

Specific heat

0.18 cal/gm

Thermoelectric Constant

1200 mV /o C @ 300

Thermal conductivity

0.0033  cal/cm/

Thermal expansion (x10^-6/ )

α11: 13.71     

α33: 7.48

Refractive Index

1.544

Q value

Acoustic velocity, SAW Frequency constant, BAW Piezoelectric coupling ,

1.8 x 106 min.

3160 ( m/sec ) 1661  ( kHz/mm )

K2  (%)  BAW:  0.65       SAW: 0.14

Inclusion

IEC Grade II

Standard Quartz Wafer Specifications

Orientation

Y, X or Z cut:   Rotated to any value in the range 30º ~ 42.75º ± 5 min.

Primary flat: orientation specified by customer ± 30 min Secondary Flat:  orientation specified by customer.

Seed:  located in the center:  width < 5mm, height > 66mm

Polished surface

Epi-ready polished on one side or two sides to Ra < 10 Å

Working Area: Wafer diameter minus 3 mm

BOW: < 20 um for 3” wafer  and 30 um  for 4” wafer

No chips out on working area. In the edge, chip width < 0.5 mm Pit and scratches:  < 3 per wafer  or < 20 per 100 wafers

Standard Thickness

0.5 mm ± 0.05 mm          TTV  < 5 um

Standard Diameter

dia. 2” (50.8mm )         diam.  3” (76.2mm)           dia. 4”(100mm)           ±0.2 mm

Primary Flat: 22 ± 1.5 mm (dia. 3” )     32 ± 3.0 mm ( dia. 4” )

Secondary Flat: 10 mm ±1.5 mm

Production Capability

>1,000 wafer per month

Customized products are available upon request.


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